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Bangkok, TH
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last 30 patents
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Patent Grant
In-situ absolute measurement process and apparatus for film thickne...
Patent number
7,821,655
Issue date
Oct 26, 2010
Axcelis Technologies, Inc.
Alan Janos
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
In-situ absolute measurement process and apparatus for film thickne...
Publication number
20060082785
Publication date
Apr 20, 2006
Alan Janos
G01 - MEASURING TESTING