Moo-Hyun Kim

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Dublin, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Carbon containing hardmask removal process using sulfur containing...
- Patent number 11,264,249
- Issue date Mar 1, 2022
- Mattson Technology, Inc.
- Fen Dai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Gas Supply With Angled Injectors In Plasma Processing Apparatus
- Publication number 20200258718
- Publication date Aug 13, 2020
- Mattson Technology, Inc.
- Tinghao F. Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Carbon Containing Hardmask Removal Process Using Sulfur Containing...
- Publication number 20200194277
- Publication date Jun 18, 2020
- Mattson Technology, Inc.
- Fen Dai
- H01 - BASIC ELECTRIC ELEMENTS