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Suwon-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Extreme ultraviolet (EUV) photomask and method of manufacturing sem...
Patent number
11,927,879
Issue date
Mar 12, 2024
Samsung Electronics Co., Ltd.
Moosong Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV photomask
Patent number
11,762,277
Issue date
Sep 19, 2023
Samsung Electronics Co., Ltd.
Moosong Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
Publication number
20240313066
Publication date
Sep 19, 2024
Samsung Electronics Co., Ltd.
Soo Kyung KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A...
Publication number
20240133683
Publication date
Apr 25, 2024
Samsung Electronics Co., Ltd.
Inho KWAK
G01 - MEASURING TESTING
Information
Patent Application
SPIN COATER AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY USI...
Publication number
20240071751
Publication date
Feb 29, 2024
Samsung Electronics Co., Ltd.
Moosong LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING RESIST PATTERN BY USING EXTREME ULTRAVIOLET LIGH...
Publication number
20240045336
Publication date
Feb 8, 2024
Samsung Electronics Co., Ltd.
Sookyung KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OVERLAY MEASURING METHOD AND SEMICONDUCTOR DEVICE FABRICATED USING...
Publication number
20230411393
Publication date
Dec 21, 2023
Samsung Electronics Co., Ltd.
Moosong LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EUV PHOTOMASK
Publication number
20220128897
Publication date
Apr 28, 2022
Samsung Electronics Co., Ltd.
Moosong LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET (EUV) PHOTOMASK AND METHOD OF MANUFACTURING SEM...
Publication number
20220100077
Publication date
Mar 31, 2022
Samsung Electronics Co., Ltd.
Moosong Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY