Morgan D. Evans

Person

Manchester, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and techniques for angled etching using multielectrode ex...
- Patent number 11,967,489
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch improvement
- Patent number 11,852,853
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Rutger Meyer Timmerman Thijssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a plurality of gratings
- Patent number 11,766,744
- Issue date Sep 26, 2023
- Applied Materials, Inc.
- Morgan Evans
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Scanned angled etching apparatus and techniques providing separate...
- Patent number 11,715,621
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modulation of rolling k vectors of angled gratings
- Patent number 11,670,482
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Joseph C. Olson
- G02 - OPTICS
Information Patent Grant
Forming variable depth structures with laser ablation
- Patent number 11,662,524
- Issue date May 30, 2023
- Applied Materials, Inc.
- Peter Kurunczi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Methods for controlling etch depth by localized heating
- Patent number 11,554,445
- Issue date Jan 17, 2023
- Applied Materials, Inc.
- Morgan Evans
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of forming gratings
- Patent number 11,512,385
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Joseph C. Olson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Variable height slanted grating method
- Patent number 11,480,724
- Issue date Oct 25, 2022
- Applied Materials, Inc.
- Morgan Evans
- G02 - OPTICS
Information Patent Grant
Modulation of rolling K vectors of angled gratings
- Patent number 11,456,152
- Issue date Sep 27, 2022
- Applied Materials, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for variable etch depths
- Patent number 11,456,205
- Issue date Sep 27, 2022
- Applied Materials, Inc.
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for forming diffracted optical element having var...
- Patent number 11,442,207
- Issue date Sep 13, 2022
- Varian Semiconductor Equipment Associates, Inc.
- Morgan Evans
- G02 - OPTICS
Information Patent Grant
Optical component having variable depth gratings and method of form...
- Patent number 11,404,278
- Issue date Aug 2, 2022
- Varian Semiconductor Equipment Associates, Inc.
- John Hautala
- G02 - OPTICS
Information Patent Grant
System and method for optimally forming gratings of diffracted opti...
- Patent number 11,402,649
- Issue date Aug 2, 2022
- Varian Semiconductor Equipment Associates, Inc.
- Morgan Evans
- G02 - OPTICS
Information Patent Grant
Controlling etch angles by substrate rotation in angled etch tools
- Patent number 11,397,289
- Issue date Jul 26, 2022
- Applied Materials, Inc.
- Rutger Meyer Timmerman Thijssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formation of angled gratings
- Patent number 11,380,578
- Issue date Jul 5, 2022
- Applied Materials, Inc.
- Rutger Meyer Timmerman Thijssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modulation of ion beam angle
- Patent number 11,367,589
- Issue date Jun 21, 2022
- Applied Materials, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shadow mask apparatus and methods for variable etch depths
- Patent number 11,335,531
- Issue date May 17, 2022
- Applied Materials, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a plurality of gratings
- Patent number 11,247,298
- Issue date Feb 15, 2022
- Applied Materials, Inc.
- Morgan Evans
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and device for a carrier proximity mask
- Patent number 11,232,930
- Issue date Jan 25, 2022
- Applied Materials, Inc.
- Morgan Evans
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of producing slanted gratings with variable etch depths
- Patent number 11,226,441
- Issue date Jan 18, 2022
- Applied Materials, Inc.
- Morgan Evans
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Methods of forming devices on a substrate
- Patent number 11,193,198
- Issue date Dec 7, 2021
- Applied Materials, Inc.
- Joseph C. Olson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and techniques for angled etching using multielectrode ex...
- Patent number 11,195,703
- Issue date Dec 7, 2021
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for forming angled structures
- Patent number 11,119,405
- Issue date Sep 14, 2021
- Applied Materials, Inc.
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for forming diffracted optical element having var...
- Patent number 11,016,228
- Issue date May 25, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Morgan Evans
- G11 - INFORMATION STORAGE
Information Patent Grant
Methods and systems for multi-area selective etching
- Patent number 11,004,648
- Issue date May 11, 2021
- Applied Materials, Inc.
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for a carrier proximity mask
- Patent number 10,991,547
- Issue date Apr 27, 2021
- Applied Materials, Inc.
- Morgan Evans
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and device for a carrier proximity mask
- Patent number 10,957,512
- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical component having depth modulated angled gratings and method...
- Patent number 10,935,799
- Issue date Mar 2, 2021
- Applied Materials, Inc.
- Rutger Meyer Timmerman Thijssen
- G02 - OPTICS
Information Patent Grant
Gate all around device and method of formation using angled ions
- Patent number 10,930,735
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Min Gyu Sung
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR ROUGHNESS REDUCTION IN MANUFACTURING OPTICAL DEVICE STRU...
- Publication number 20230375774
- Publication date Nov 23, 2023
- Applied Materials, Inc.
- Thomas James SOLDI
- G02 - OPTICS
Information Patent Application
SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...
- Publication number 20230335375
- Publication date Oct 19, 2023
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULATION OF ROLLING K VECTORS OF ANGLED GRATINGS
- Publication number 20230260746
- Publication date Aug 17, 2023
- Applied Materials, Inc.
- Joseph C. OLSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING VARIABLE DEPTH STRUCTURES WITH LASER ABLATION
- Publication number 20230251430
- Publication date Aug 10, 2023
- Applied Materials, Inc.
- Peter KURUNCZI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
VARIABLE HEIGHT SLANTED GRATING METHOD
- Publication number 20230010821
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Morgan EVANS
- G02 - OPTICS
Information Patent Application
FORMATION OF ANGLED GRATINGS
- Publication number 20220301926
- Publication date Sep 22, 2022
- Applied Materials, Inc.
- Rutger MEYER TIMMERMAN THIJSSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROLLING ETCH ANGLES BY SUBSTRATE ROTATION IN ANGLED ETCH TOOLS
- Publication number 20220260764
- Publication date Aug 18, 2022
- Applied Materials, Inc.
- Rutger MEYER TIMMERMAN THIJSSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHADOW MASK APPARATUS AND METHODS FOR VARIABLE ETCH DEPTHS
- Publication number 20220238295
- Publication date Jul 28, 2022
- Applied Materials, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A PLURALITY OF GRATINGS
- Publication number 20220161363
- Publication date May 26, 2022
- Applied Materials, Inc.
- Morgan EVANS
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND TECHNIQUES FOR ANGLED ETCHING USING MULTIELECTRODE EX...
- Publication number 20220051880
- Publication date Feb 17, 2022
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR VARIABLE ETCH DEPTHS
- Publication number 20210351069
- Publication date Nov 11, 2021
- Applied Materials, Inc.
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROLLING ETCH ANGLES BY SUBSTRATE ROTATION IN ANGLED ETCH TOOLS
- Publication number 20210333450
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Rutger MEYER TIMMERMAN THIJSSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VARIABLE HEIGHT SLANTED GRATING METHOD
- Publication number 20210294014
- Publication date Sep 23, 2021
- Morgan EVANS
- G02 - OPTICS
Information Patent Application
FORMING VARIABLE DEPTH STRUCTURES WITH LASER ABLATION
- Publication number 20210286132
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Peter KURUNCZI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SHADOW MASK APPARATUS AND METHODS FOR VARIABLE ETCH DEPTHS
- Publication number 20210257179
- Publication date Aug 19, 2021
- Applied Materials, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCH IMPROVEMENT
- Publication number 20210247554
- Publication date Aug 12, 2021
- Applied Materials, Inc.
- Rutger MEYER TIMMERMAN THIJSSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR A CARRIER PROXIMITY MASK
- Publication number 20210210308
- Publication date Jul 8, 2021
- Applied Materials, Inc.
- Morgan Evans
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF PRODUCING SLANTED GRATINGS WITH VARIABLE ETCH DEPTHS
- Publication number 20210141131
- Publication date May 13, 2021
- Applied Materials, Inc.
- Morgan Evans
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR A CARRIER PROXIMITY MASK
- Publication number 20210090843
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR A CARRIER PROXIMITY MASK
- Publication number 20210090858
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE DEVICES AND METHODS OF FORMATION USING ANGLED IONS
- Publication number 20210050349
- Publication date Feb 18, 2021
- Applied Materials, Inc.
- ANTHONY RENAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULATION OF ROLLING K VECTORS OF ANGLED GRATINGS
- Publication number 20210027985
- Publication date Jan 28, 2021
- Applied Materials, Inc.
- Joseph C. OLSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL COMPONENT HAVING VARIABLE DEPTH GRATINGS AND METHOD OF FORM...
- Publication number 20210005461
- Publication date Jan 7, 2021
- Varian Semiconductor Equipment Associates, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE STRUCTURE FOR FORMING SEMICONDUCTOR DEVICE HAVING ANGLED CON...
- Publication number 20200279852
- Publication date Sep 3, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Sony Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR OPTIMALLY FORMING GRATINGS OF DIFFRACTED OPTI...
- Publication number 20200271944
- Publication date Aug 27, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Morgan Evans
- G02 - OPTICS
Information Patent Application
SYSTEM AND METHOD FOR FORMING DIFFRACTED OPTICAL ELEMENT HAVING VAR...
- Publication number 20200233125
- Publication date Jul 23, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Morgan Evans
- G02 - OPTICS
Information Patent Application
METHODS OF PRODUCING SLANTED GRATINGS
- Publication number 20200192009
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- Morgan Evans
- G02 - OPTICS
Information Patent Application
METHOD OF FORMING GRATINGS
- Publication number 20200192010
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- Joseph C. OLSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND SYSTEMS FOR MULTI-AREA SELECTIVE ETCHING
- Publication number 20200194215
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...
- Publication number 20200194226
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS

Morgan D. Evans

Person

Patents Grantslast 30 patents

Apparatus and techniques for angled etching using multielectrode ex...

Etch improvement

Method of forming a plurality of gratings

Scanned angled etching apparatus and techniques providing separate...

Modulation of rolling k vectors of angled gratings

Forming variable depth structures with laser ablation

Methods for controlling etch depth by localized heating

Method of forming gratings

Variable height slanted grating method

Modulation of rolling K vectors of angled gratings

Methods for variable etch depths

System and method for forming diffracted optical element having var...

Optical component having variable depth gratings and method of form...

System and method for optimally forming gratings of diffracted opti...

Controlling etch angles by substrate rotation in angled etch tools

Formation of angled gratings

Modulation of ion beam angle

Shadow mask apparatus and methods for variable etch depths

Method of forming a plurality of gratings

Method and device for a carrier proximity mask

Methods of producing slanted gratings with variable etch depths

Methods of forming devices on a substrate

Apparatus and techniques for angled etching using multielectrode ex...

Techniques for forming angled structures

System and method for forming diffracted optical element having var...

Methods and systems for multi-area selective etching

Method and device for a carrier proximity mask

Method and device for a carrier proximity mask

Optical component having depth modulated angled gratings and method...

Gate all around device and method of formation using angled ions

Patents Applicationslast 30 patents

METHOD FOR ROUGHNESS REDUCTION IN MANUFACTURING OPTICAL DEVICE STRU...

SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...

MODULATION OF ROLLING K VECTORS OF ANGLED GRATINGS

FORMING VARIABLE DEPTH STRUCTURES WITH LASER ABLATION

VARIABLE HEIGHT SLANTED GRATING METHOD

FORMATION OF ANGLED GRATINGS

CONTROLLING ETCH ANGLES BY SUBSTRATE ROTATION IN ANGLED ETCH TOOLS

SHADOW MASK APPARATUS AND METHODS FOR VARIABLE ETCH DEPTHS

METHOD OF FORMING A PLURALITY OF GRATINGS

APPARATUS AND TECHNIQUES FOR ANGLED ETCHING USING MULTIELECTRODE EX...

METHODS FOR VARIABLE ETCH DEPTHS

CONTROLLING ETCH ANGLES BY SUBSTRATE ROTATION IN ANGLED ETCH TOOLS

VARIABLE HEIGHT SLANTED GRATING METHOD

FORMING VARIABLE DEPTH STRUCTURES WITH LASER ABLATION

SHADOW MASK APPARATUS AND METHODS FOR VARIABLE ETCH DEPTHS

ETCH IMPROVEMENT

METHOD AND DEVICE FOR A CARRIER PROXIMITY MASK

METHODS OF PRODUCING SLANTED GRATINGS WITH VARIABLE ETCH DEPTHS

METHOD AND DEVICE FOR A CARRIER PROXIMITY MASK

METHOD AND DEVICE FOR A CARRIER PROXIMITY MASK

GATE DEVICES AND METHODS OF FORMATION USING ANGLED IONS

MODULATION OF ROLLING K VECTORS OF ANGLED GRATINGS

OPTICAL COMPONENT HAVING VARIABLE DEPTH GRATINGS AND METHOD OF FORM...

DEVICE STRUCTURE FOR FORMING SEMICONDUCTOR DEVICE HAVING ANGLED CON...

SYSTEM AND METHOD FOR OPTIMALLY FORMING GRATINGS OF DIFFRACTED OPTI...

SYSTEM AND METHOD FOR FORMING DIFFRACTED OPTICAL ELEMENT HAVING VAR...

METHODS OF PRODUCING SLANTED GRATINGS

METHOD OF FORMING GRATINGS

METHODS AND SYSTEMS FOR MULTI-AREA SELECTIVE ETCHING

SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...