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Morihiko Kume
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Tokyo, JP
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last 30 patents
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Patent Grant
Method for processing semiconductor substrate
Patent number
6,319,331
Issue date
Nov 20, 2001
Mitsubishi Denki Kabushiki Kaisha
Morihiko Kume
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor wafer evaluating method and semiconductor device manu...
Patent number
5,946,543
Issue date
Aug 31, 1999
Mitsubishi Denki Kabushiki
Yasuhiro Kimura
G01 - MEASURING TESTING