Morihiro Takanashi

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer apparatus and substrate transfer method
- Patent number 11,309,199
- Issue date Apr 19, 2022
- Tokyo Electron Limited
- Keita Horiuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and gas supply method
- Patent number 8,465,593
- Issue date Jun 18, 2013
- Tokyo Electron Limited
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,349,085
- Issue date Jan 8, 2013
- Tokyo Electron Limited
- Shigeru Tahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 8,003,920
- Issue date Aug 23, 2011
- Tokyo Electron Limited
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20210005486
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Keita HORIUCHI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20150132960
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Eiichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND CLEANING METHOD FOR REMOVING METAL...
- Publication number 20140060572
- Publication date Mar 6, 2014
- TOKYO ELECTRON LIMITED
- Chiaki YASUMURO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100206846
- Publication date Aug 19, 2010
- TOKYO ELECTRON LIMITED
- Eiichi Nishimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VALVE ELEMENT, PARTICLE ENTRY PREVENTIVE MECHANISM, EXHAUST CONTROL...
- Publication number 20100043894
- Publication date Feb 25, 2010
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20090188428
- Publication date Jul 30, 2009
- TOKYO ELECTRON LIMITED
- Isamu SAKURAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20080210680
- Publication date Sep 4, 2008
- TOKYO ELECTRON LIMITED
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20080179006
- Publication date Jul 31, 2008
- TOKYO ELECTRON LIMITED
- Shigeru TAHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY METHOD
- Publication number 20080182423
- Publication date Jul 31, 2008
- TOKYO ELECTRON LIMITED
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS

Morihiro Takanashi

Person

Patents Grantslast 30 patents

Substrate transfer apparatus and substrate transfer method

Substrate processing apparatus and gas supply method

Substrate processing apparatus

Substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND CLEANING METHOD FOR REMOVING METAL...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

VALVE ELEMENT, PARTICLE ENTRY PREVENTIVE MECHANISM, EXHAUST CONTROL...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY METHOD