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Morio Hosoya
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Reflective mask blank and method of manufacturing a reflective mask
Patent number
9,229,315
Issue date
Jan 5, 2016
Hoya Corporation
Morio Hosoya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Photomask blank, photomask, and method for manufacturing photomask...
Patent number
9,075,314
Issue date
Jul 7, 2015
Hoya Corporation
Hiroyuki Iwashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reflective mask blank and method of manufacturing a reflective mask
Patent number
8,709,685
Issue date
Apr 29, 2014
Hoya Corporation
Morio Hosoya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Reflective mask blank and method of manufacturing a reflective mask
Patent number
8,546,047
Issue date
Oct 1, 2013
Hoya Corporation
Morio Hosoya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Photomask blank, photomask, and method for manufacturing photomask...
Patent number
8,512,916
Issue date
Aug 20, 2013
Hoya Corporation
Hiroyuki Iwashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reflective mask blank and method of manufacturing a reflective mask
Patent number
8,389,184
Issue date
Mar 5, 2013
Hoya Corporation
Morio Hosoya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Reflective mask blank, method of manufacturing a reflective mask bl...
Patent number
8,329,361
Issue date
Dec 11, 2012
Hoya Corporation
Morio Hosoya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Multilayer reflective film coated substrate, manufacturing method t...
Patent number
8,081,384
Issue date
Dec 20, 2011
Hoya Corporation
Morio Hosoya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Reflective mask blank and method of producing the same, and method...
Patent number
8,021,807
Issue date
Sep 20, 2011
Hoya Corporation
Morio Hosoya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Reflective mask blank, reflective mask and methods of producing the...
Patent number
7,981,573
Issue date
Jul 19, 2011
Hoya Corporation
Shinichi Ishibashi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Multilayer reflective film coated substrate, manufacturing method t...
Patent number
7,804,648
Issue date
Sep 28, 2010
Hoya Corporation
Morio Hosoya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Reflective mask blank, reflective mask, and method of manufacturing...
Patent number
7,700,245
Issue date
Apr 20, 2010
Hoya Corporation
Morio Hosoya
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Reflection type mask blank and reflection type mask and production...
Patent number
7,390,596
Issue date
Jun 24, 2008
Hoya Corporation
Shinichi Ishibashi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of manufacturing a reflection type mask blank and method of...
Patent number
7,056,627
Issue date
Jun 6, 2006
Hoya Corporation
Tsutomu Shoki
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Reflection type mask blank for EUV exposure and reflection type mas...
Patent number
6,749,973
Issue date
Jun 15, 2004
Hoya Corporation
Tsutomu Shoki
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Substrate with multilayer film, reflection type mask blank for expo...
Patent number
6,737,201
Issue date
May 18, 2004
Hoya Corporation
Tsutomu Shoki
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
PHOTOMASK BLANK, PHOTOMASK, AND METHOD FOR MANUFACTURING PHOTOMASK...
Publication number
20140057199
Publication date
Feb 27, 2014
HOYA CORPORATION
Hiroyuki Iwashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFLECTIVE MASK BLANK AND METHOD OF MANUFACTURING A REFLECTIVE MASK
Publication number
20140011122
Publication date
Jan 9, 2014
HOYA CORPORATION
Morio Hosoya
B82 - NANO-TECHNOLOGY
Information
Patent Application
REFLECTIVE MASK BLANK AND METHOD OF MANUFACTURING A REFLECTIVE MASK
Publication number
20130071779
Publication date
Mar 21, 2013
HOYA CORPORATION
Morio Hosoya
B82 - NANO-TECHNOLOGY
Information
Patent Application
PHOTOMASK BLANK, PHOTOMASK, AND METHOD OF MANUFACTURING PHOTOMASK B...
Publication number
20110305978
Publication date
Dec 15, 2011
HOYA CORPORATION
Hiroyuki Iwashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REFLECTIVE MASK BLANK AND METHOD OF MANUFACTURING A REFLECTIVE MASK
Publication number
20110281207
Publication date
Nov 17, 2011
HOYA CORPORATION
Morio Hosoya
B82 - NANO-TECHNOLOGY
Information
Patent Application
REFLECTIVE MASK BLANK AND METHOD OF MANUFACTURING A REFLECTIVE MASK
Publication number
20110217633
Publication date
Sep 8, 2011
HOYA CORPORATION
Morio Hosoya
B82 - NANO-TECHNOLOGY
Information
Patent Application
REFLECTIVE MASK BLANK AND METHOD OF MANUFACTURING A REFLECTIVE MASK
Publication number
20100266938
Publication date
Oct 21, 2010
HOYA CORPORATION
Morio Hosoya
B82 - NANO-TECHNOLOGY
Information
Patent Application
METHOD OF PRODUCING A REFLECTIVE MASK
Publication number
20100084375
Publication date
Apr 8, 2010
HOYA CORPORATION
Morio HOSOYA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reflective mask blank, reflective mask, and method of manufacturing...
Publication number
20070275308
Publication date
Nov 29, 2007
Hoya Corporation
Morio Hosoya
B82 - NANO-TECHNOLOGY
Information
Patent Application
Multilayer reflective film coated substrate, manufacturing method t...
Publication number
20070091420
Publication date
Apr 26, 2007
Hoya Corporation
Morio Hosoya
G02 - OPTICS
Information
Patent Application
Reflective mask blank, reflective mask, and method for manufacturin...
Publication number
20060270226
Publication date
Nov 30, 2006
Hoya Corporation
Morio Hosoya
B82 - NANO-TECHNOLOGY
Information
Patent Application
Sputtering target, method of manufacturing a multilayer reflective...
Publication number
20060237303
Publication date
Oct 26, 2006
Hoya Corporation
Morio Hosoya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate with a multilayer reflection film, reflection type mask b...
Publication number
20050238922
Publication date
Oct 27, 2005
Hoya Corporation
Takeru Kinoshita
B82 - NANO-TECHNOLOGY
Information
Patent Application
Reflection type mask blank and reflection type mask and production...
Publication number
20050208389
Publication date
Sep 22, 2005
HOYA CORPORATION
Shinichi Ishibashi
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method of manufacturing a reflection type mask blank and method of...
Publication number
20050100797
Publication date
May 12, 2005
Hoya Corporation
Tsutomu Shoki
B82 - NANO-TECHNOLOGY
Information
Patent Application
Reflection type mask blank for EUV exposure and reflection type mas...
Publication number
20020110743
Publication date
Aug 15, 2002
Hoya Corporation
Tsutomu Shoki
B82 - NANO-TECHNOLOGY
Information
Patent Application
Substrate with multilayer film, reflection type mask blank for expo...
Publication number
20020076625
Publication date
Jun 20, 2002
Hoya Corporation
Tsutomu Shoki
B82 - NANO-TECHNOLOGY