Moriyoshi Kinoshita

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Iwate, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and purging method
- Patent number 11,367,642
- Issue date Jun 21, 2022
- Tokyo Electron Limited
- Moriyoshi Kinoshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer device, substrate processing apparatus, and transfer method
- Patent number 10,978,322
- Issue date Apr 13, 2021
- Tokyo Electron Limited
- Ao Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,529,608
- Issue date Jan 7, 2020
- Tokyo Electron Limited
- Moriyoshi Kinoshita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PURGING METHOD
- Publication number 20200083078
- Publication date Mar 12, 2020
- TOKYO ELECTRON LIMITED
- Moriyoshi Kinoshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER DEVICE, SUBSTRATE PROCESSING APPARATUS, AND TRANSFER METHOD
- Publication number 20190067055
- Publication date Feb 28, 2019
- TOKYO ELECTRON LIMITED
- Ao Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170256430
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Moriyoshi Kinoshita
- H01 - BASIC ELECTRIC ELEMENTS