Morohisa Tamura

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Suyama Susono, JP

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Patents Grantslast 30 patents

Information Patent Grant
Composite sputtering cathode assembly and sputtering apparatus with...
- Patent number 6,290,826
- Issue date Sep 18, 2001
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Hisaharu Obinata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...