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Morris S. Poteet
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Dripping Springs, TX, US
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last 30 patents
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Patent Grant
Polishing system having a carrier head with substrate presence sensing
Patent number
6,905,392
Issue date
Jun 14, 2005
FREESCALE SEMICONDUCTOR, INC.
Brian E. Bottema
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Polishing system having a carrier head with substrate presence sensing
Publication number
20040266324
Publication date
Dec 30, 2004
Brian E. Bottema
B24 - GRINDING POLISHING