Moshe Baruch

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Misgav, IL

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Patents Grantslast 30 patents

Information Patent Grant
Optics symmetrization for metrology
- Patent number 9,164,397
- Issue date Oct 20, 2015
- KLA-Tencor Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Grant
Overlay metrology by pupil phase analysis
- Patent number 8,582,114
- Issue date Nov 12, 2013
- KLA-Tencor Corporation
- Amnon Manassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,242,477
- Issue date Jul 10, 2007
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OVERLAY METROLOGY BY PUPIL PHASE ANALYSIS
- Publication number 20130044331
- Publication date Feb 21, 2013
- KLA-Tencor Corporation
- Amnon Manassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICS SYMMETRIZATION FOR METROLOGY
- Publication number 20120033226
- Publication date Feb 9, 2012
- KLA-Tencor Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and methods for detecting overlay errors using scatterometry
- Publication number 20040233441
- Publication date Nov 25, 2004
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING