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Moshe E. Preil
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Stochastic reticle defect dispositioning
Patent number
10,990,019
Issue date
Apr 27, 2021
KLA Corporation
Moshe E. Preil
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multi-column spacing for photomask and reticle inspection and wafer...
Patent number
10,777,377
Issue date
Sep 15, 2020
KLA-Tencor Corporation
Robert Haynes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stochastically-aware metrology and fabrication
Patent number
10,474,042
Issue date
Nov 12, 2019
KLA-Tencor Corporation
John J. Biafore
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System, method and computer program product for systematic and stoc...
Patent number
10,262,408
Issue date
Apr 16, 2019
KLA-Tencor Corporation
Allen Park
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods for fabricating integrated circuits using directed self-ass...
Patent number
9,530,662
Issue date
Dec 27, 2016
GLOBALFOUNDRIES, INC.
Azat Latypov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sidewall image templates for directed self-assembly materials
Patent number
9,508,562
Issue date
Nov 29, 2016
GLOBALFOUNDRIES Inc.
Ji Xu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods for improved monitor and control of lithography processes
Patent number
9,188,974
Issue date
Nov 17, 2015
KLA-Tencor Technologies Corp.
Chris Mack
G05 - CONTROLLING REGULATING
Information
Patent Grant
Asymmetric templates for forming non-periodic patterns using direct...
Patent number
8,956,808
Issue date
Feb 17, 2015
GLOBALFOUNDRIES Inc.
Gerard M. Schmid
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optimizing lithographic processes using laser annealing techniques
Patent number
8,889,343
Issue date
Nov 18, 2014
GLOBALFOUNDRIES Inc.
Moshe E Preil
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Chemical and physical templates for forming patterns using directed...
Patent number
8,790,522
Issue date
Jul 29, 2014
GLOBALFOUNDRIES Inc.
Gerard M. Schmid
B44 - DECORATIVE ARTS
Information
Patent Grant
Photo-mask and wafer image reconstruction
Patent number
8,644,588
Issue date
Feb 4, 2014
Luminescent Technologies, Inc.
Moshe E. Preil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Photo-mask and wafer image reconstruction
Patent number
8,331,645
Issue date
Dec 11, 2012
Luminescent Technologies, Inc.
Moshe E. Preil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Process window signature patterns for lithography process control
Patent number
8,318,391
Issue date
Nov 27, 2012
ASML Netherlands B.V.
Jun Ye
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photo-mask and wafer image reconstruction
Patent number
8,280,146
Issue date
Oct 2, 2012
Luminescent Technologies, Inc.
Moshe E. Preil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Photo-mask and wafer image reconstruction
Patent number
8,260,032
Issue date
Sep 4, 2012
Luminescent Technologies, Inc.
Moshe E. Preil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Photo-mask and wafer image reconstruction
Patent number
8,208,712
Issue date
Jun 26, 2012
Luminescent Technologies, Inc.
Moshe E. Preil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Photo-mask and wafer image reconstruction
Patent number
8,204,295
Issue date
Jun 19, 2012
Luminescent Technologies, Inc.
Moshe E. Preil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Photo-mask and wafer image reconstruction
Patent number
8,200,002
Issue date
Jun 12, 2012
Luminescent Technologies, Inc.
Moshe E. Preil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Process window signature patterns for lithography process control
Patent number
8,057,967
Issue date
Nov 15, 2011
ASML Netherlands B.V.
Jun Ye
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for detecting, sampling, analyzing, and correcting marginal...
Patent number
7,853,920
Issue date
Dec 14, 2010
ASML Netherlands B.V.
Moshe E. Preil
G01 - MEASURING TESTING
Information
Patent Grant
Overlay metrology and control method
Patent number
7,804,994
Issue date
Sep 28, 2010
KLA-Tencor Technologies Corporation
Michael Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and systems for detecting defects in a reticle design pattern
Patent number
7,769,225
Issue date
Aug 3, 2010
KLA-Tencor Technologies Corp.
Sagar A. Kekare
G01 - MEASURING TESTING
Information
Patent Grant
System and method for measuring and analyzing lithographic paramete...
Patent number
7,749,666
Issue date
Jul 6, 2010
ASML Netherlands B.V.
Michael J. Gassner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for identifying and using process window signature patterns...
Patent number
7,695,876
Issue date
Apr 13, 2010
Brion Technologies, Inc.
Jun Ye
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods, systems, and carrier media for evaluating reticle layout data
Patent number
7,689,966
Issue date
Mar 30, 2010
KLA-Tencor Technologies Corp.
Gaurav Verma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Computer-implemented methods for detecting defects in reticle desig...
Patent number
7,646,906
Issue date
Jan 12, 2010
KLA-Tencor Technologies Corp.
Zain K. Saidin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus and methods for optically monitoring the fidelity of patt...
Patent number
7,557,921
Issue date
Jul 7, 2009
KLA-Tencor Technologies Corporation
Michael E. Adel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and application of metrology and process diagnostic informat...
Patent number
6,868,301
Issue date
Mar 15, 2005
KLA-Tencor Corporation
Moshe E. Preil
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Stochastic Reticle Defect Dispositioning
Publication number
20200326634
Publication date
Oct 15, 2020
KLA Corporation
Moshe E. Preil
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
WAFER DISTORTION MEASUREMENT AND OVERLAY CORRECTION
Publication number
20200018709
Publication date
Jan 16, 2020
GLOBALFOUNDRIES INC.
Erik R. Hosler
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR SYSTEMATIC AND STOC...
Publication number
20180300870
Publication date
Oct 18, 2018
KLA-Tencor Corporation
Allen Park
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Stochastically-Aware Metrology and Fabrication
Publication number
20180275523
Publication date
Sep 27, 2018
KLA-Tencor Corporation
John J. Biafore
G01 - MEASURING TESTING
Information
Patent Application
Multi-Column Spacing for Photomask and Reticle Inspection and Wafer...
Publication number
20180233318
Publication date
Aug 16, 2018
KLA-Tencor Corporation
Robert Haynes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FABRICATING INTEGRATED CIRCUITS USING DIRECTED SELF-ASS...
Publication number
20160247686
Publication date
Aug 25, 2016
GLOBALFOUNDRIES, Inc.
Azat Latypov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND CONTROLLERS FOR CONTROLLING FOCUS OF ULTRAVIOLET LIGHT...
Publication number
20160033879
Publication date
Feb 4, 2016
GLOBALFOUNDRIES, Inc.
Sudharshanan Raghunathan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SIDEWALL IMAGE TEMPLATES FOR DIRECTED SELF-ASSEMBLY MATERIALS
Publication number
20150380252
Publication date
Dec 31, 2015
GLOBALFOUNDRIES INC.
Ji Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMICAL AND PHYSICAL TEMPLATES FOR FORMING PATTERNS USING DIRECTED...
Publication number
20140224764
Publication date
Aug 14, 2014
GLOBALFOUNDRIES INC.
Gerard M. Schmid
B44 - DECORATIVE ARTS
Information
Patent Application
ASYMMETRIC TEMPLATES FOR FORMING NON-PERIODIC PATTERNS USING DIRECT...
Publication number
20140154630
Publication date
Jun 5, 2014
Gerard M. Schmid
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CO-OPTIMIZATION OF SCATTEROMETRY MARK DESIGN AND PROCESS MONITOR MA...
Publication number
20130325395
Publication date
Dec 5, 2013
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
Wenzhan Zhou
G01 - MEASURING TESTING
Information
Patent Application
PHOTO-MASK AND WAFER IMAGE RECONSTRUCTION
Publication number
20120189187
Publication date
Jul 26, 2012
Moshe E. Preil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Process Window Signature Patterns for Lithography Process Control
Publication number
20120021343
Publication date
Jan 26, 2012
ASML NETHERLANDS B.V.
Jun Ye
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for identifying and using process window signature patterns...
Publication number
20100151364
Publication date
Jun 17, 2010
Brion Technology, Inc.
Jun Ye
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTO-MASK AND WAFER IMAGE RECONSTRUCTION
Publication number
20100135568
Publication date
Jun 3, 2010
Moshe E. Preil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Photo-Mask and Wafer Image Reconstruction
Publication number
20100119143
Publication date
May 13, 2010
Moshe E. Preil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Photo-Mask and Wafer Image Reconstruction
Publication number
20100086195
Publication date
Apr 8, 2010
Moshe E. Preil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Photo-Mask and Wafer Image Reconstruction
Publication number
20100080443
Publication date
Apr 1, 2010
Moshe E. Preil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Photo-Mask and Wafer Image Reconstruction
Publication number
20100021824
Publication date
Jan 28, 2010
Moshe E. Preil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Photo-Mask and Wafer Image Reconstruction
Publication number
20100021042
Publication date
Jan 28, 2010
Moshe E. Preil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Photo-Mask and Wafer Image Reconstruction
Publication number
20100021043
Publication date
Jan 28, 2010
Moshe E. Preil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR IDENTIFYING AND USING PROCESS WINDOW SIGNATURE PATTERNS...
Publication number
20070050749
Publication date
Mar 1, 2007
BRION TECHNOLOGIES, INC.
Jun Ye
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Methods and systems for detecting defects in a reticle design pattern
Publication number
20070035728
Publication date
Feb 15, 2007
Sagar A. Kekare
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM AND METHOD FOR MEASURING AND ANALYZING LITHOGRAPHIC PARAMETE...
Publication number
20070035712
Publication date
Feb 15, 2007
BRION TECHNOLOGIES, INC.
Michael J. Gassner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for detecting, sampling, analyzing, and correcting marginal...
Publication number
20060273266
Publication date
Dec 7, 2006
BRION TECHNOLOGIES, INC.
Moshe E. Preil
G01 - MEASURING TESTING
Information
Patent Application
Computer-implemented methods for detecting defects in reticle desig...
Publication number
20060236294
Publication date
Oct 19, 2006
Zain K. Saidin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Methods, systems, and carrier media for evaluating reticle layout data
Publication number
20060062445
Publication date
Mar 23, 2006
Gaurav Verma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Overlay metrology and control method
Publication number
20030223630
Publication date
Dec 4, 2003
KLA-Tencor Corporation
Michael Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY