Motoharu Yamada

Person

  • Hiratsuka-shi, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Polishing method for semiconductor wafer

    • Publication number 20070059935
    • Publication date Mar 15, 2007
    • KOMATSU ELECTRONIC METALS CO., LTD.
    • Kazuaki Kozasa
    • B24 - GRINDING POLISHING