Membership
Tour
Register
Log in
Motohiro OKAMURA
Follow
Person
Koshi City, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus, substrate processing method and com...
Patent number
11,565,287
Issue date
Jan 31, 2023
Tokyo Electron Limited
Motohiro Okamura
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus, substrate processing method and com...
Patent number
11,207,717
Issue date
Dec 28, 2021
Tokyo Electron Limited
Motohiro Okamura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CLEANING METHOD OF CUP OF SUBSTRATE PROCESSING APPARATUS AND SUBSTR...
Publication number
20230187199
Publication date
Jun 15, 2023
TOKYO ELECTRON LIMITED
Motohiro Okamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing Apparatus, Substrate Processing Method and Com...
Publication number
20220048082
Publication date
Feb 17, 2022
TOKYO ELECTRON LIMITED
Motohiro OKAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing Apparatus, Substrate Processing Method and Com...
Publication number
20190262875
Publication date
Aug 29, 2019
TOKYO ELECTRON LIMITED
Motohiro OKAMURA
B08 - CLEANING