Motohiro Takahashi

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Stage device, charged particle beam apparatus, and vacuum apparatus
- Patent number 11,417,496
- Issue date Aug 16, 2022
- Hitachi, Ltd.
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, sample alignment method of charged...
- Patent number 11,342,156
- Issue date May 24, 2022
- HITACHI HIGH-TECH CORPORATION
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus and charged particle beam apparatus
- Patent number 11,049,687
- Issue date Jun 29, 2021
- HITACHI HIGH-TECH CORPORATION
- Motohiro Takahashi
- G01 - MEASURING TESTING
Information Patent Grant
Stage apparatus, and charged particle beam apparatus
- Patent number 10,879,033
- Issue date Dec 29, 2020
- HITACHI HIGH-TECH CORPORATION
- Akira Nishioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle radiation device
- Patent number 10,840,059
- Issue date Nov 17, 2020
- HITACHI HIGH-TECH CORPORATION
- Kentaro Shigeoka
- G05 - CONTROLLING REGULATING
Information Patent Grant
Charged particle beam apparatus comprising a controller to set cont...
- Patent number 10,804,067
- Issue date Oct 13, 2020
- HITACHI HIGH-TECH CORPORATION
- Takanori Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device and charged particle beam device
- Patent number 10,770,259
- Issue date Sep 8, 2020
- HITACHI HIGH-TECH CORPORATION
- Motohiro Takahashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Stage device and charged particle beam device
- Patent number 10,658,151
- Issue date May 19, 2020
- HITACHI HIGH-TECH CORPORATION
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device and charged particle beam device
- Patent number 10,600,614
- Issue date Mar 24, 2020
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,586,676
- Issue date Mar 10, 2020
- Hitachi High-Technologies Corporation
- Takanori Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus and charged particle beam apparatus
- Patent number 10,366,912
- Issue date Jul 30, 2019
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and vibration damper for charged pa...
- Patent number 10,056,226
- Issue date Aug 21, 2018
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus with braking system for lens, beam, or vibration co...
- Patent number 9,905,393
- Issue date Feb 27, 2018
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample positioning apparatus, sample stage, and charged particle be...
- Patent number 8,946,652
- Issue date Feb 3, 2015
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20240404780
- Publication date Dec 5, 2024
- HITACHI HIGH-TECH CORPORATION
- Masahiro KAMIGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE
- Publication number 20240363305
- Publication date Oct 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage Device, Charged Particle Beam Device, and Vacuum Device
- Publication number 20240258063
- Publication date Aug 1, 2024
- Hitachi High-Tech Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE, CHARGED PARTICLE BEAM DEVICE, AND VACUUM DEVICE
- Publication number 20230369011
- Publication date Nov 16, 2023
- HITACHI HIGH-TECH CORPORATION
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE APPARATUS, CHARGED PARTICLE BEAM APPARATUS, AND OPTICAL INSPE...
- Publication number 20230343622
- Publication date Oct 26, 2023
- HITACHI HIGH-TECH CORPORATION
- Takanori KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE, CHARGED PARTICLE BEAM APPARATUS, AND VACUUM APPARATUS
- Publication number 20230260740
- Publication date Aug 17, 2023
- HITACHI HIGH-TECH CORPORATION
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE, AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20230215684
- Publication date Jul 6, 2023
- HITACHI HIGH-TECH CORPORATION
- Motohiro TAKAHASHI
- G01 - MEASURING TESTING
Information Patent Application
STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING STAGE...
- Publication number 20230143197
- Publication date May 11, 2023
- HITACHI HIGH-TECH CORPORATION
- Akira NISHIOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20230137117
- Publication date May 4, 2023
- HITACHI HIGH-TECH CORPORATION
- Hironori OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage Movement Control Apparatus and Charged Particle Beam System
- Publication number 20220148845
- Publication date May 12, 2022
- Hitachi High-Tech Corporation
- Hironori OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, SAMPLE ALIGNMENT METHOD OF CHARGED...
- Publication number 20210265129
- Publication date Aug 26, 2021
- HITACHI HIGH-TECH CORPORATION
- Hironori OGAWA
- G01 - MEASURING TESTING
Information Patent Application
Stage Device, Charged Particle Beam Apparatus, and Vacuum Apparatus
- Publication number 20210027978
- Publication date Jan 28, 2021
- Hitachi, Ltd
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS
- Publication number 20200176217
- Publication date Jun 4, 2020
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE APPARATUS, AND CHARGED PARTICLE BEAM APPARATUS
- Publication number 20190378678
- Publication date Dec 12, 2019
- Hitachi High-Technologies Corporation
- Akira NISHIOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Radiation Device
- Publication number 20190311876
- Publication date Oct 10, 2019
- Hitachi High-Technologies Corporation
- Kentaro SHIGEOKA
- G05 - CONTROLLING REGULATING
Information Patent Application
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20190259567
- Publication date Aug 22, 2019
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20190252151
- Publication date Aug 15, 2019
- Hitachi High-Technologies Corporation
- Takanori KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20190228947
- Publication date Jul 25, 2019
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20190108970
- Publication date Apr 11, 2019
- Hitachi High-Technologies Corporation
- Takanori KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20190103246
- Publication date Apr 4, 2019
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage Apparatus and Charged Particle Beam Apparatus
- Publication number 20180247855
- Publication date Aug 30, 2018
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND VIBRATION DAMPER FOR CHARGED PA...
- Publication number 20170250054
- Publication date Aug 31, 2017
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage Apparatus and Charged Particle Radiation Apparatus Equipped w...
- Publication number 20160284506
- Publication date Sep 29, 2016
- Hitachi High-Technologies Corporation
- Hironori OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE POSITIONING APPARATUS, SAMPLE STAGE, AND CHARGED PARTICLE BE...
- Publication number 20140312246
- Publication date Oct 23, 2014
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Motohiro Takahashi

Person

Patents Grantslast 30 patents

Stage device, charged particle beam apparatus, and vacuum apparatus

Charged particle beam apparatus, sample alignment method of charged...

Stage apparatus and charged particle beam apparatus

Stage apparatus, and charged particle beam apparatus

Charged particle radiation device

Charged particle beam apparatus comprising a controller to set cont...

Stage device and charged particle beam device

Stage device and charged particle beam device

Stage device and charged particle beam device

Charged particle beam device

Stage apparatus and charged particle beam apparatus

Charged particle beam apparatus and vibration damper for charged pa...

Stage apparatus with braking system for lens, beam, or vibration co...

Sample positioning apparatus, sample stage, and charged particle be...

Patents Applicationslast 30 patents

SEMICONDUCTOR PROCESSING APPARATUS

STAGE DEVICE

Stage Device, Charged Particle Beam Device, and Vacuum Device

STAGE DEVICE, CHARGED PARTICLE BEAM DEVICE, AND VACUUM DEVICE

STAGE APPARATUS, CHARGED PARTICLE BEAM APPARATUS, AND OPTICAL INSPE...

STAGE DEVICE, CHARGED PARTICLE BEAM APPARATUS, AND VACUUM APPARATUS

STAGE DEVICE, AND CHARGED PARTICLE BEAM DEVICE

STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING STAGE...

Charged Particle Beam Device

Stage Movement Control Apparatus and Charged Particle Beam System

CHARGED PARTICLE BEAM APPARATUS, SAMPLE ALIGNMENT METHOD OF CHARGED...

Stage Device, Charged Particle Beam Apparatus, and Vacuum Apparatus

STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS

STAGE APPARATUS, AND CHARGED PARTICLE BEAM APPARATUS

Charged Particle Radiation Device

STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE

CHARGED PARTICLE BEAM APPARATUS

STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE

CHARGED PARTICLE BEAM DEVICE

STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE

Stage Apparatus and Charged Particle Beam Apparatus

CHARGED PARTICLE BEAM APPARATUS AND VIBRATION DAMPER FOR CHARGED PA...

Stage Apparatus and Charged Particle Radiation Apparatus Equipped w...

SAMPLE POSITIONING APPARATUS, SAMPLE STAGE, AND CHARGED PARTICLE BE...