Motohiro TANAKA

Person

Kudamatsu, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 12,014,903
- Issue date Jun 18, 2024
- HITACHI HIGH-TECH CORPORATION
- Tetsuo Kawanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vehicle
- Patent number 11,772,498
- Issue date Oct 3, 2023
- SUBARU CORPORATION
- Chihiro Oguro
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,699,909
- Issue date Jun 30, 2020
- HITACH HIGH-TECH CORPORATION
- Yasushi Sonoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 9,960,031
- Issue date May 1, 2018
- Hitachi High-Technologies Corporation
- Masahiro Sumiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 9,496,147
- Issue date Nov 15, 2016
- Hitachi High-Technologies Corporation
- Masahiro Sumiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,557,709
- Issue date Oct 15, 2013
- Hitachi High-Technologies Corporation
- Masahiro Sumiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,236,701
- Issue date Aug 7, 2012
- Hitachi High-Technologies Corporation
- Masahiro Sumiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 7,955,514
- Issue date Jun 7, 2011
- Hitachi High-Technologies Corporation
- Kazue Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VEHICLE DRIVING APPARATUS
- Publication number 20240300469
- Publication date Sep 12, 2024
- SUBARU CORPORATION
- Motohiro TANAKA
- B60 - VEHICLES IN GENERAL
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240014010
- Publication date Jan 11, 2024
- Hitachi High-Tech Corporation
- Tetsuo KAWANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220415618
- Publication date Dec 29, 2022
- Hitachi High-Tech Corporation
- Tetsuo Kawanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220319809
- Publication date Oct 6, 2022
- Hitachi High-Tech Corporation
- Taku Iwase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VEHICLE
- Publication number 20210221235
- Publication date Jul 22, 2021
- SUBARU CORPORATION
- Chihiro OGURO
- B60 - VEHICLES IN GENERAL
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190088453
- Publication date Mar 21, 2019
- Hitachi High-Technologies Corporation
- Yasushi SONODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20180277402
- Publication date Sep 27, 2018
- Hitachi High-Technologies Corporation
- Masatoshi KAWAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20170032955
- Publication date Feb 2, 2017
- Hitachi High-Technologies Corporation
- Masahiro SUMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20160133530
- Publication date May 12, 2016
- Hitachi High-Technologies Corporation
- Yasushi SONODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20160027618
- Publication date Jan 28, 2016
- Hitachi High-Technologies Corporation
- Masatoshi Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20150024599
- Publication date Jan 22, 2015
- Hitachi High-Technologies Corporation
- Masahiro SUMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20140053983
- Publication date Feb 27, 2014
- Hitachi High-Technologies Corporation
- Masahiro SUMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20120252200
- Publication date Oct 4, 2012
- Hitachi High-Technologies Corporation
- Masahiro Sumiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20110226734
- Publication date Sep 22, 2011
- MASAHIRO SUMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRY ETCHING METHOD OF HIGH-K FILM
- Publication number 20110171833
- Publication date Jul 14, 2011
- Koichi NAKAUNE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20100197137
- Publication date Aug 5, 2010
- Masahiro SUMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRY ETCHING METHOD OF HIGH-K FILM
- Publication number 20090065479
- Publication date Mar 12, 2009
- Koichi NAKAUNE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20080169065
- Publication date Jul 17, 2008
- Kazue Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Motohiro TANAKA

Person

Patents Grantslast 30 patents

Plasma processing apparatus

Vehicle

Plasma processing apparatus and plasma processing method

Plasma processing apparatus and plasma processing method

Plasma processing apparatus and plasma processing method

Plasma processing apparatus and plasma processing method

Plasma processing apparatus and plasma processing method

Plasma processing apparatus and plasma processing method

Patents Applicationslast 30 patents

VEHICLE DRIVING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

VEHICLE

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

DRY ETCHING METHOD OF HIGH-K FILM

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

DRY ETCHING METHOD OF HIGH-K FILM

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD