Motoi OKADA

Person

Hokkaido, JP

People

Patents Grantslast 30 patents

Information Patent Grant
State determination device, state determination method, and compute...
- Patent number 12,176,227
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Junnosuke Maki
- G05 - CONTROLLING REGULATING
Information Patent Grant
Abnormality detection apparatus and abnormality detection method
- Patent number 11,928,810
- Issue date Mar 12, 2024
- Tokyo Electron Limited
- Motoi Okada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate state determining apparatus, substrate processing apparat...
- Patent number 11,598,007
- Issue date Mar 7, 2023
- Tokyo Electron Limited
- Nao Akashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus, monitoring device of substrate proc...
- Patent number 9,927,373
- Issue date Mar 27, 2018
- Tokyo Electron Limited
- Motoi Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process monitoring device and process monitoring method in semicond...
- Patent number 8,989,477
- Issue date Mar 24, 2015
- Tokyo Electron Limited
- Yasutoshi Umehara
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
POSITION DETECTION METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240320837
- Publication date Sep 26, 2024
- TOKYO ELECTRON LIMITED
- Hikaru SATO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ABNORMALITY DETECTION APPARATUS AND ABNORMALITY DETECTION METHOD
- Publication number 20240212130
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Motoi OKADA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MONITORING APPARATUS, SUBSTRATE PROCESSING APPARATUS, MONITORING ME...
- Publication number 20220400232
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Yuichiro KUNUGIMOTO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
STATE DETERMINATION DEVICE, STATE DETERMINATION METHOD, AND COMPUTE...
- Publication number 20220223443
- Publication date Jul 14, 2022
- TOKYO ELECTRON LIMITED
- Junnosuke MAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABNORMALITY DETECTION APPARATUS AND ABNORMALITY DETECTION METHOD
- Publication number 20210304383
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Motoi OKADA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE STATE DETERMINING APPARATUS, SUBSTRATE PROCESSING APPARAT...
- Publication number 20200080202
- Publication date Mar 12, 2020
- TOKYO ELECTRON LIMITED
- Nao Akashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, MONITORING DEVICE OF SUBSTRATE PROC...
- Publication number 20140240486
- Publication date Aug 28, 2014
- TOKYO ELECTRON LIMITED
- Motoi OKADA
- G01 - MEASURING TESTING
Information Patent Application
PROCESS MONITORING DEVICE AND PROCESS MONITORING METHOD IN SEMICOND...
- Publication number 20130236088
- Publication date Sep 12, 2013
- TOKYO ELECTRON LIMITED
- Yasutoshi UMEHARA
- G06 - COMPUTING CALCULATING COUNTING

Motoi OKADA

Person

Patents Grantslast 30 patents

State determination device, state determination method, and compute...

Abnormality detection apparatus and abnormality detection method

Substrate state determining apparatus, substrate processing apparat...

Substrate processing apparatus, monitoring device of substrate proc...

Process monitoring device and process monitoring method in semicond...

Patents Applicationslast 30 patents

POSITION DETECTION METHOD AND SUBSTRATE PROCESSING APPARATUS

ABNORMALITY DETECTION APPARATUS AND ABNORMALITY DETECTION METHOD

MONITORING APPARATUS, SUBSTRATE PROCESSING APPARATUS, MONITORING ME...

STATE DETERMINATION DEVICE, STATE DETERMINATION METHOD, AND COMPUTE...

ABNORMALITY DETECTION APPARATUS AND ABNORMALITY DETECTION METHOD

SUBSTRATE STATE DETERMINING APPARATUS, SUBSTRATE PROCESSING APPARAT...

SUBSTRATE PROCESSING APPARATUS, MONITORING DEVICE OF SUBSTRATE PROC...

PROCESS MONITORING DEVICE AND PROCESS MONITORING METHOD IN SEMICOND...