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Motoi TAKAHASHI
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Miyagi, JP
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last 30 patents
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Patent Application
METHOD FOR ETCHING FOR SEMICONDUCTOR FABRICATION
Publication number
20230307242
Publication date
Sep 28, 2023
TOKYO ELECTRON LIMITED
Yu-Hao Tsai
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230223249
Publication date
Jul 13, 2023
TOKYO ELECTRON LIMITED
Motoi TAKAHASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230215700
Publication date
Jul 6, 2023
TOKYO ELECTRON LIMITED
Kae KUMAGAI
H01 - BASIC ELECTRIC ELEMENTS