TREA

Motoi YAMAGATA

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Patents Grantslast 30 patents

  • Information Patent Grant

    Method for manufacturing substrate with sensor
    • Patent number 12,167,542
    • Issue date Dec 10, 2024
    • Tokyo Electron Limited
    • Manabu Nakagawasai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus and method
    • Patent number 11,532,784
    • Issue date Dec 20, 2022
    • Tokyo Electron Limited
    • Manabu Nakagawasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Stage device and processing apparatus
    • Patent number 11,417,504
    • Issue date Aug 16, 2022
    • Tokyo Electron Limited
    • Manabu Nakagawasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240209509
    • Publication date Jun 27, 2024
    • TOKYO ELECTRON LIMITED
    • Naoya FUKUDA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR PROCESSING SUBSTRATE
    • Publication number 20230249306
    • Publication date Aug 10, 2023
    • TOKYO ELECTRON LIMITED
    • Yusuke KIKUCHI
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    MOUNTING TABLE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND METHO...
    • Publication number 20220238314
    • Publication date Jul 28, 2022
    • TOKYO ELECTRON LIMITED
    • Motoi YAMAGATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD AND DEVICE FOR SUBSTRATE PROCESSING
    • Publication number 20220220606
    • Publication date Jul 14, 2022
    • TOKYO ELECTRON LIMITED
    • Tamaki TAKEYAMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR MANUFACTURING SUBSTRATE WITH SENSOR
    • Publication number 20220151078
    • Publication date May 12, 2022
    • TOKYO ELECTRON LIMITED
    • Manabu NAKAGAWASAI
    • G01 - MEASURING TESTING
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD
    • Publication number 20210280777
    • Publication date Sep 9, 2021
    • TOKYO ELECTRON LIMITED
    • Manabu NAKAGAWASAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    STAGE DEVICE AND PROCESSING APPARATUS
    • Publication number 20200135434
    • Publication date Apr 30, 2020
    • TOKYO ELECTRON LIMITED
    • Manabu NAKAGAWASAI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...