Motoki Akimoto

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Sagamihara-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of object transfer for a heat treatment system
- Patent number 8,147,241
- Issue date Apr 3, 2012
- Tokyo Electron Limited
- Shinya Mochizuki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heat treatment system and method therefore
- Patent number 7,819,658
- Issue date Oct 26, 2010
- Tokyo Electron Limited
- Kazunari Sakata
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heat treatment system and a method for cooling a loading chamber
- Patent number 7,210,924
- Issue date May 1, 2007
- Tokyo Electron Limited
- Shinya Mochizuki
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Heat treatment system and a method for cooling a loading chamber
- Patent number 7,059,849
- Issue date Jun 13, 2006
- Tokyo Electron Limited
- Kazunari Sakata
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Heat treatment method that includes a low negative pressure
- Patent number 6,852,601
- Issue date Feb 8, 2005
- Tokyo Electron Limited
- Seiichi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment method and heat treatment apparatus
- Patent number 6,409,503
- Issue date Jun 25, 2002
- Tokyo Electron Limited
- Seiichi Yoshida
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF OBJECT TRANSFER FOR A HEAT TREATMENT SYSTEM
- Publication number 20100316968
- Publication date Dec 16, 2010
- TOKYO ELECTRON LIMITED
- Shinya MOCHIZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treatment system and method therefore
- Publication number 20070166657
- Publication date Jul 19, 2007
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treatment system and a method for cooling a loading chamber
- Publication number 20050053891
- Publication date Mar 10, 2005
- Shinya Mochizuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treatment method and heat treatment apparatus
- Publication number 20020110769
- Publication date Aug 15, 2002
- Seiichi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vertical heat treatment system, method for controlling vertical hea...
- Publication number 20020023458
- Publication date Feb 28, 2002
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS