Motoko NAKAGOMI

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate mounting table
- Patent number 10,968,514
- Issue date Apr 6, 2021
- Tokyo Electron Limited
- Kohichi Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching film
- Patent number 10,504,743
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Motoko Nakagomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method
- Patent number 10,319,585
- Issue date Jun 11, 2019
- Tokyo Electron Limited
- Kohichi Satoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method, storage medium and etching apparatus
- Patent number 9,390,933
- Issue date Jul 12, 2016
- Tokyo Electron Limited
- Kensaku Narushima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING METAL FILM AND FILM FORMING APPARATUS
- Publication number 20190385843
- Publication date Dec 19, 2019
- TOKYO ELECTRON LIMITED
- Satoshi WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20190371572
- Publication date Dec 5, 2019
- TOKYO ELECTRON LIMITED
- Satoshi WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE MOUNTING TABLE
- Publication number 20190153597
- Publication date May 23, 2019
- TOKYO ELECTRON LIMITED
- Kohichi SATOH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF ETCHING FILM
- Publication number 20180366337
- Publication date Dec 20, 2018
- TOKYO ELECTRON LIMITED
- Motoko NAKAGOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD
- Publication number 20180102244
- Publication date Apr 12, 2018
- TOKYO ELECTRON LIMITED
- Kohichi SATOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, STORAGE MEDIUM AND ETCHING APPARATUS
- Publication number 20150187593
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS