TREA

Motonari Takebayashi

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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing apparatus, method of manufacturing semiconduct...
    • Patent number 10,604,839
    • Issue date Mar 31, 2020
    • Kokusai Electric Corporation
    • Tetsuaki Inada
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Batch-type remote plasma processing apparatus
    • Patent number 9,373,499
    • Issue date Jun 21, 2016
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Batch-type remote plasma processing apparatus
    • Patent number 9,039,912
    • Issue date May 26, 2015
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Batch-type remote plasma processing apparatus
    • Patent number 8,544,411
    • Issue date Oct 1, 2013
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 8,518,182
    • Issue date Aug 27, 2013
    • Hitachi Kokusai Electric Inc.
    • Shizue Ogawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 8,444,363
    • Issue date May 21, 2013
    • Hitachi Kokusai Electric Inc.
    • Masakazu Sakata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Batch-type remote plasma processing apparatus
    • Patent number 8,028,652
    • Issue date Oct 4, 2011
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Batch-type remote plasma processing apparatus
    • Patent number 8,020,514
    • Issue date Sep 20, 2011
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 7,958,842
    • Issue date Jun 14, 2011
    • Hitachi Kokusai Electric Inc.
    • Shizue Ogawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Batch-type remote plasma processing apparatus
    • Patent number 7,861,668
    • Issue date Jan 4, 2011
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents