Motonari Tateno

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Optical inspection apparatus and optical inspection method
- Patent number 7,423,745
- Issue date Sep 9, 2008
- NEC Corporation
- Hideyuki Moribe
- G01 - MEASURING TESTING
Information Patent Grant
Optical reticle substrate inspection apparatus and beam scanning me...
- Patent number 6,665,112
- Issue date Dec 16, 2003
- NEC Corporation
- Motonari Tateno
- G01 - MEASURING TESTING
Information Patent Grant
Optical reticle substrate inspection apparatus and beam scanning me...
- Patent number 6,538,795
- Issue date Mar 25, 2003
- NEC Corporation
- Motonari Tateno
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Optical inspection apparatus and optical inspection method
- Publication number 20060066844
- Publication date Mar 30, 2006
- NEC Corporation
- Hideyuki Moribe
- G01 - MEASURING TESTING
Information Patent Application
Optical reticle substrate inspection apparatus and beam scanning me...
- Publication number 20030117683
- Publication date Jun 26, 2003
- NEC Corporation
- Motonari Tateno
- G01 - MEASURING TESTING
Information Patent Application
Optical reticle substrate inspection apparatus and beam scanning me...
- Publication number 20020093719
- Publication date Jul 18, 2002
- NEC Corporation
- Motonari Tateno
- G01 - MEASURING TESTING