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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam device
Patent number
11,670,481
Issue date
Jun 6, 2023
HITACHI HIGH-TECH CORPORATION
Motonobu Hommi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern measurement device and computer program for evaluating patt...
Patent number
9,804,107
Issue date
Oct 31, 2017
Hitachi High-Technologies Corporation
Akiyuki Sugiyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Charged Particle Beam Device
Publication number
20220165537
Publication date
May 26, 2022
HITACHI HIGH-TECH CORPORATION
Motonobu HOMMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pattern Measurement Device and Computer Program
Publication number
20160313266
Publication date
Oct 27, 2016
Hitachi High-Technologies Corporation
Akiyuki SUGIYAMA
G01 - MEASURING TESTING