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Motonobu Kawai
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Yokohama, JP
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last 30 patents
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Patent Grant
Apparatus and method for manufacturing a semiconductor device
Patent number
6,534,870
Issue date
Mar 18, 2003
Kabushiki Kaisha Toshiba
Yoshiaki Shimooka
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for manufacturing semiconductor device
Patent number
6,458,713
Issue date
Oct 1, 2002
Kabushiki Kaisha Toshiba
Nobuhide Yamada
H01 - BASIC ELECTRIC ELEMENTS