Motoo Koyama

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Discharge lamp, light source apparatus, exposure apparatus, and exp...
- Patent number 8,704,431
- Issue date Apr 22, 2014
- Nikon Corporation
- Hiroshi Shirasu
- F21 - LIGHTING
Information Patent Grant
Discharge lamp, light source apparatus, exposure apparatus, and exp...
- Patent number 8,531,093
- Issue date Sep 10, 2013
- Nikon Corporation
- Hiroshi Shirasu
- F21 - LIGHTING
Information Patent Grant
Light detecting apparatus, illumination optical apparatus, exposure...
- Patent number 7,573,019
- Issue date Aug 11, 2009
- Nikon Corporation
- Motoo Koyama
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus, method for manufacturing therof, method for exp...
- Patent number 6,811,953
- Issue date Nov 2, 2004
- Nikon Corporation
- Hitoshi Hatada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical apparatus, exposure apparatus, and exposure method
- Patent number 6,750,951
- Issue date Jun 15, 2004
- Nikon Corporation
- Motoo Koyama
- G02 - OPTICS
Information Patent Grant
Apparatus and methods for detecting thickness of a patterned layer
- Patent number 6,489,624
- Issue date Dec 3, 2002
- Nikon Corporation
- Yoshijiro Ushio
- G01 - MEASURING TESTING
Information Patent Grant
Radiation imaging device and radiation detector
- Patent number 6,339,219
- Issue date Jan 15, 2002
- Nikon Corporation
- Tohru Ishizuya
- G01 - MEASURING TESTING
Information Patent Grant
Film inspection method
- Patent number 6,102,775
- Issue date Aug 15, 2000
- Nikon Corporation
- Yoshijiro Ushio
- B24 - GRINDING POLISHING
Information Patent Grant
Reflective liquid crystal spatial light modulator and projection ap...
- Patent number 5,949,503
- Issue date Sep 7, 1999
- Nikon Corporation
- Motoo Koyama
- G02 - OPTICS
Information Patent Grant
Optical system for infrared camera
- Patent number 5,909,307
- Issue date Jun 1, 1999
- Nikon Corporation
- Motoo Koyama
- G02 - OPTICS
Information Patent Grant
Projection optical system
- Patent number 5,839,808
- Issue date Nov 24, 1998
- Nikon Corporation
- Motoo Koyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical apparatus for projecting a mask pattern onto the...
- Patent number 5,793,473
- Issue date Aug 11, 1998
- Nikon Corporation
- Motoo Koyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LIGHT SOURCE DEVICE AND ELECTRONIC APPARATUS
- Publication number 20150138834
- Publication date May 21, 2015
- Nikon Corporation
- Takeshi YAGI
- G02 - OPTICS
Information Patent Application
DISCHARGE LAMP, LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS, AND EXP...
- Publication number 20120248960
- Publication date Oct 4, 2012
- NIKON CORPORATION
- Hiroshi SHIRASU
- F21 - LIGHTING
Information Patent Application
Discharge lamp, light source apparatus, exposure apparatus, and exp...
- Publication number 20080218049
- Publication date Sep 11, 2008
- Hiroshi Shirasu
- F21 - LIGHTING
Information Patent Application
Light Detecting Apparatus, Illumination Optical Apparatus, Exposure...
- Publication number 20080042044
- Publication date Feb 21, 2008
- Nikon Corporation
- Motoo Koyama
- G01 - MEASURING TESTING
Information Patent Application
Exposure apparatus and an exposure method
- Publication number 20030227607
- Publication date Dec 11, 2003
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, method for manufacturing thereof, method for ex...
- Publication number 20020005940
- Publication date Jan 17, 2002
- Nikon Corporation
- Hitoshi Hatada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical apparatus, exposure apparatus, and exposure method
- Publication number 20010033490
- Publication date Oct 25, 2001
- Motoo Koyama
- G02 - OPTICS

Motoo Koyama

Person

Patents Grantslast 30 patents

Discharge lamp, light source apparatus, exposure apparatus, and exp...

Discharge lamp, light source apparatus, exposure apparatus, and exp...

Light detecting apparatus, illumination optical apparatus, exposure...

Exposure apparatus, method for manufacturing therof, method for exp...

Optical apparatus, exposure apparatus, and exposure method

Apparatus and methods for detecting thickness of a patterned layer

Radiation imaging device and radiation detector

Film inspection method

Reflective liquid crystal spatial light modulator and projection ap...

Optical system for infrared camera

Projection optical system

Projection optical apparatus for projecting a mask pattern onto the...

Patents Applicationslast 30 patents

LIGHT SOURCE DEVICE AND ELECTRONIC APPARATUS

DISCHARGE LAMP, LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS, AND EXP...

Discharge lamp, light source apparatus, exposure apparatus, and exp...

Light Detecting Apparatus, Illumination Optical Apparatus, Exposure...

Exposure apparatus and an exposure method

Exposure apparatus, method for manufacturing thereof, method for ex...

Optical apparatus, exposure apparatus, and exposure method