Motoshi SAKAI

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Suwon-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Light source and extreme ultraviolet light source system using the...
- Patent number 11,828,952
- Issue date Nov 28, 2023
- Samsung Electronics Co., Ltd.
- Dohyung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser beam delivery apparatus for extreme ultra violet light source
- Patent number 11,778,719
- Issue date Oct 3, 2023
- Samsung Electronics Co., Ltd.
- Dohyung Kim
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
LIGHT SOURCE AND EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM USING THE...
- Publication number 20220066225
- Publication date Mar 3, 2022
- Samsung Electronics Co., Ltd.
- Dohyung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER BEAM DELIVERY APPARATUS FOR EXTREME ULTRA VIOLET LIGHT SOURCE
- Publication number 20210219408
- Publication date Jul 15, 2021
- Samsung Electronics Co., Ltd.
- Dohyung KIM
- H01 - BASIC ELECTRIC ELEMENTS