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X-ray lithography apparatus
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Patent number 4,852,133
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Issue date Jul 25, 1989
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Hitachi, Ltd.
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Minoru Ikeda
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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X-ray exposure system
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Patent number 4,803,712
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Issue date Feb 7, 1989
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Hitachi, Ltd.
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Yukio Kembo
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Light-exposure apparatus
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Patent number 4,666,291
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Issue date May 19, 1987
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Hitachi, Ltd.
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Motoya Taniguchi
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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X-Ray lithographic apparatus
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Patent number 4,516,254
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Issue date May 7, 1985
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Hitachi, Ltd.
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Yoshihiro Komeyama
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Exposure process and system
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Patent number 4,475,223
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Issue date Oct 2, 1984
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Hitachi, Ltd.
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Motoya Taniguchi
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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X-Ray exposure apparatus
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Patent number 4,403,336
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Issue date Sep 6, 1983
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Hitachi, Ltd.
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Motoya Taniguchi
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY