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Motoyuki Shima
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Yokkaichi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing system, substrate cleaning method, and recordi...
Patent number
10,792,711
Issue date
Oct 6, 2020
Tokyo Electron Limited
Meitoku Aibara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system, substrate cleaning method, and recordi...
Patent number
10,272,478
Issue date
Apr 30, 2019
Tokyo Electron Limited
Meitoku Aibara
B08 - CLEANING
Information
Patent Grant
Cleaning composition for semiconductor substrate and cleaning method
Patent number
10,023,827
Issue date
Jul 17, 2018
JSR Corporation
Kenji Mochida
B08 - CLEANING
Information
Patent Grant
Composition for forming liquid immersion upper layer film, and polymer
Patent number
9,926,462
Issue date
Mar 27, 2018
JSR Corporation
Kiyoshi Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist pattern-forming method, substrate-processing method, and pho...
Patent number
9,817,311
Issue date
Nov 14, 2017
JSR Corporation
Yuichiro Katsura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate cleaning method and recording medium
Patent number
9,818,598
Issue date
Nov 14, 2017
Tokyo Electron Limited
Meitoku Aibara
B08 - CLEANING
Information
Patent Grant
Composition for forming liquid immersion upper layer film, and polymer
Patent number
9,540,535
Issue date
Jan 10, 2017
JSR Corporation
Kiyoshi Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist pattern-forming method, substrate-processing method, and pho...
Patent number
9,417,527
Issue date
Aug 16, 2016
JSR Corporation
Yuichiro Katsura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Double patterning method
Patent number
8,927,200
Issue date
Jan 6, 2015
JSR Corporation
Kanako Meya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Upper layer-forming composition and resist patterning method
Patent number
8,501,389
Issue date
Aug 6, 2013
JSR Corporation
Kazunori Kusabiraki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation-sensitive resin composition
Patent number
7,144,675
Issue date
Dec 5, 2006
JSR Corporation
Motoyuki Shima
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Radiation sensitive resin composition
Patent number
7,078,148
Issue date
Jul 18, 2006
JSR Corporation
Motoyuki Shima
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Radiation-sensitive resin composition
Patent number
6,800,419
Issue date
Oct 5, 2004
JSR Corporation
Akimasa Soyano
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
COMPOSITION AND SUBSTRATE-TREATING METHOD
Publication number
20210115221
Publication date
Apr 22, 2021
JSR Corporation
Shun Aoki
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CLEANING METHOD, AND RECORDI...
Publication number
20190118227
Publication date
Apr 25, 2019
TOKYO ELECTRON LIMITED
Meitoku AIBARA
B08 - CLEANING
Information
Patent Application
CLEANING COMPOSITION FOR SEMICONDUCTOR SUBSTRATE AND CLEANING METHOD
Publication number
20170240851
Publication date
Aug 24, 2017
JSR Corporation
Kenji MOCHIDA
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
COMPOSITION FOR FORMING LIQUID IMMERSION UPPER LAYER FILM, AND POLYMER
Publication number
20170073541
Publication date
Mar 16, 2017
JSR Corporation
Kiyoshi TANAKA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
RESIST PATTERN-FORMING METHOD, SUBSTRATE-PROCESSING METHOD, AND PHO...
Publication number
20160266489
Publication date
Sep 15, 2016
JSR Corporation
Yuichiro KATSURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CLEANING METHOD, AND RECORDI...
Publication number
20160035561
Publication date
Feb 4, 2016
TOKYO ELECTRON LIMITED
Meitoku AIBARA
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING METHOD AND RECORDING MEDIUM
Publication number
20160035564
Publication date
Feb 4, 2016
TOKYO ELECTRON LIMITED
Meitoku AIBARA
B08 - CLEANING
Information
Patent Application
CLEANING COMPOSITION FOR SEMICONDUCTOR SUBSTRATE AND CLEANING METHOD
Publication number
20160032227
Publication date
Feb 4, 2016
JSR Corporation
Kenji MOCHIDA
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
RESIST PATTERN-FORMING METHOD, SUBSTRATE-PROCESSING METHOD, AND PHO...
Publication number
20150048051
Publication date
Feb 19, 2015
JSR Corporation
Yuichiro KATSURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FORMING PHOTORESIST PATTERN
Publication number
20140147794
Publication date
May 29, 2014
JSR Corporation
Norihiko SUGIE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DOUBLE PATTERNING METHOD
Publication number
20140080066
Publication date
Mar 20, 2014
JSR Corporation
Kanako MEYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION FOR FORMING LIQUID IMMERSION UPPER LAYER FILM, AND POLYMER
Publication number
20130217850
Publication date
Aug 22, 2013
JSR Corporation
Kiyoshi TANAKA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
COMPOSITION FOR FORMING LIQUID IMMERSION UPPER LAYER FILM AND METHO...
Publication number
20130084524
Publication date
Apr 4, 2013
JSR Corporation
Takahiro HAYAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
UPPER LAYER FILM-FORMING COMPOSITION AND METHOD OF FORMING PHOTORES...
Publication number
20120171613
Publication date
Jul 5, 2012
JSR Corporation
Norihiko SUGIE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
UPPER LAYER-FORMING COMPOSITION AND RESIST PATTERNING METHOD
Publication number
20110262859
Publication date
Oct 27, 2011
JSR Corporation
Kazunori KUSABIRAKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Radiation sensitive resin composition
Publication number
20040072094
Publication date
Apr 15, 2004
Motoyuki Shima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Radiation-sensitive resin composition
Publication number
20040048192
Publication date
Mar 11, 2004
Motoyuki Shima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Radiation-sensitive resin composition
Publication number
20030203307
Publication date
Oct 30, 2003
Akimasa Soyano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY