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Pellicle for EUV
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Patent number 9,195,130
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Issue date Nov 24, 2015
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Shin-Etsu Chemical Co., Ltd.
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Motoyuki Yamada
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Positive resist material
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Patent number 5,356,753
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Issue date Oct 18, 1994
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Shin-Etsu Chemical Co., Ltd.
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Motoyuki Yamada
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Resist compositions
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Patent number 5,314,931
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Issue date May 24, 1994
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Shin-Etsu Chemical Co., Limited
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Motoyuki Yamada
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Lithium cell
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Patent number 5,219,681
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Issue date Jun 15, 1993
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Shin-Etsu Chemical Co., Ltd.
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Motoyuki Yamada
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H01 - BASIC ELECTRIC ELEMENTS
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