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Moyuru Yasuhara
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Tokyo-To, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Determining method of thermal processing condition
Patent number
7,138,607
Issue date
Nov 21, 2006
Tokyo Electron Limited
Wenling Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Batch-type heat treatment apparatus and control method for the batc...
Patent number
6,803,548
Issue date
Oct 12, 2004
Tokyo Electron Limited
Wenling Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Determining method of thermal processing condition
Patent number
6,787,377
Issue date
Sep 7, 2004
Tokyo Electron Limited
Wenling Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Batch type heat treatment system, method for controlling same, and...
Patent number
6,730,885
Issue date
May 4, 2004
Tokyo Electron Limited
Fujio Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of determining set temperature trajectory for heat treatment...
Patent number
6,495,805
Issue date
Dec 17, 2002
Tokyo Electron Limited
Koichi Sakamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of temperature-calibrating heat treating apparatus
Patent number
6,329,643
Issue date
Dec 11, 2001
Tokyo Electron Limited
Fujio Suzuki
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
Semiconductor device manufacturing system
Publication number
20070076942
Publication date
Apr 5, 2007
Yasuo Yatsugake
G01 - MEASURING TESTING
Information
Patent Application
Determining method of thermal processing condition
Publication number
20040226933
Publication date
Nov 18, 2004
Wenling Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of determining heat treatment conditions
Publication number
20030109071
Publication date
Jun 12, 2003
Wenling Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of processing wafer
Publication number
20020127828
Publication date
Sep 12, 2002
Fujio Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Batch-type heat treatment apparatus and control method for the batc...
Publication number
20020045146
Publication date
Apr 18, 2002
Wenling Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Batch type heat treatment system, method for controlling same, and...
Publication number
20020014483
Publication date
Feb 7, 2002
Fujio Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of determining set temperature trajectory for heat treatment...
Publication number
20020001788
Publication date
Jan 3, 2002
Koichi Sakamoto
H01 - BASIC ELECTRIC ELEMENTS