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Szeged, HU
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last 30 patents
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Patent Grant
Lithographic method with the capability of spectrum engineering to...
Patent number
9,291,915
Issue date
Mar 22, 2016
University of Szeged
Mária Csete
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
Novel Lithographic Method with the Capability of Spectrum Engineeri...
Publication number
20140226139
Publication date
Aug 14, 2014
UNIVERSITY OF SZEGED
Mária Csete
G02 - OPTICS