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TAI-HSI HSIANG, TW
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last 30 patents
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Patent Grant
Plasma chamber wafer clamping ring with erosion resistive tips
Patent number
6,166,898
Issue date
Dec 26, 2000
ProMOS Technologies, Inc.
Ray C. Lee
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ETCHING GAS FOR SILICON ETCH BACK
Publication number
20020066884
Publication date
Jun 6, 2002
NIEN-YU TSAI
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...