Muehiro Ogasawara

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Multi charged particle beam writing method and multi charged partic...
- Patent number 8,729,507
- Issue date May 20, 2014
- Nuflare Technology, Inc.
- Ryoichi Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS