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Muhsin ERALP
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Bethel, CT, US
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Patents Grants
last 30 patents
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Patent Grant
Alignment sensor based on wavelength-scanning
Patent number
11,841,626
Issue date
Dec 12, 2023
ASML Holding N.V.
Muhsin Eralp
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase modulators in alignment to decrease mark size
Patent number
11,803,130
Issue date
Oct 31, 2023
ASML Netherlands B.V.
Franciscus Godefridus Casper Bijnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SYSTEMS AND METHODS FOR MEASURING INTENSITY IN A LITHOGRAPHIC ALIGN...
Publication number
20240077308
Publication date
Mar 7, 2024
ASML Holding N.V.
Mohamed SWILLAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METROLOGY SYSTEM AND COHERENCE ADJUSTERS
Publication number
20240027913
Publication date
Jan 25, 2024
ASML NETHERLANDS B.V.
Sergei SOKOLOV
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHASE MODULATORS IN ALIGNMENT TO DECREASE MARK SIZE
Publication number
20220397833
Publication date
Dec 15, 2022
ASML NETHERLANDS B.V.
Franciscus Godefridus Casper BIJNEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ALIGNMENT SENSOR BASED ON WAVELENGTH-SCANNING
Publication number
20220299892
Publication date
Sep 22, 2022
ASML Holding N.V.
Muhsin ERALP
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY