Mukul Kelkar

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and methods for upgraded substrate processing system with...
- Patent number 6,361,707
- Issue date Mar 26, 2002
- Applied Materials, Inc.
- Tsutomu Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for upgraded substrate processing system with...
- Patent number 6,230,652
- Issue date May 15, 2001
- Applied Materials, Inc.
- Tsutomu Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for determining the endpoint in a plasma clean...
- Patent number 6,079,426
- Issue date Jun 27, 2000
- Applied Materials, Inc.
- Sudhakar Subrahmanyam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave apparatus for in-situ vacuum line cleaning for substrate...
- Patent number 6,045,618
- Issue date Apr 4, 2000
- Applied Materials, Inc.
- Sebastien Raoux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for upgraded substrate processing system with...
- Patent number 6,039,834
- Issue date Mar 21, 2000
- Applied Materials, Inc.
- Tsutomu Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...