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Muneaki TAMURA
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Yamanashi, JP
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Patents Grants
last 30 patents
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Patent Grant
Probe device and method of adjusting the same
Patent number
11,340,263
Issue date
May 24, 2022
Tokyo Electron Limited
Muneaki Tamura
G01 - MEASURING TESTING
Information
Patent Grant
Probe apparatus and probe method
Patent number
10,310,010
Issue date
Jun 4, 2019
Tokyo Electron Limited
Muneaki Tamura
G01 - MEASURING TESTING
Information
Patent Grant
Position accuracy inspecting method, position accuracy inspecting a...
Patent number
10,006,941
Issue date
Jun 26, 2018
Tokyo Electron Limited
Kenta Saiki
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Test Device, Test Method, and Memory Medium
Publication number
20200241069
Publication date
Jul 30, 2020
TOKYO ELECTRON LIMITED
Muneaki TAMURA
G01 - MEASURING TESTING
Information
Patent Application
PROBE DEVICE AND METHOD OF ADJUSTING THE SAME
Publication number
20200174040
Publication date
Jun 4, 2020
TOKYO ELECTRON LIMITED
Muneaki TAMURA
G01 - MEASURING TESTING
Information
Patent Application
POSITION ACCURACY INSPECTING METHOD, POSITION ACCURACY INSPECTING A...
Publication number
20170219625
Publication date
Aug 3, 2017
TOKYO ELECTRON LIMITED
Kenta Saiki
G01 - MEASURING TESTING
Information
Patent Application
PROBE APPARATUS AND PROBE METHOD
Publication number
20160161553
Publication date
Jun 9, 2016
TOKYO ELECTRON LIMITED
Muneaki TAMURA
G01 - MEASURING TESTING