Munehito KAGAYA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing device, and plasma processing method
- Patent number 12,020,900
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Munehito Kagaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 11,996,296
- Issue date May 28, 2024
- Tokyo Electron Limited
- Kae Kumagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 11,658,008
- Issue date May 23, 2023
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,626,330
- Issue date Apr 11, 2023
- Tokyo Electron Limited
- Yuji Otsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 10,643,839
- Issue date May 5, 2020
- Tokyo Electron Limited
- Ayuta Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing carbon nanotubes and method for forming wiring
- Patent number 10,378,104
- Issue date Aug 13, 2019
- Tokyo Electron Limited
- Daisuke Nishide
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Substrate processing apparatus
- Patent number 10,121,680
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing graphene
- Patent number 9,822,009
- Issue date Nov 21, 2017
- Tokyo Electron Limited
- Munehito Kagaya
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Graphene forming method
- Patent number 9,702,039
- Issue date Jul 11, 2017
- Tokyo Electron Limited
- Daisuke Nishide
- C01 - INORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MEASURING FILM THICKNESS, AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250067556
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Yuji OTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240371631
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD
- Publication number 20240331977
- Publication date Oct 3, 2024
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING SILICON NITRIDE FILM AND FILM FORMING APPARATUS
- Publication number 20240087885
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RECESS FILLING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230377876
- Publication date Nov 23, 2023
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIN FILM EMBEDDING METHOD AND FILM FORMATION APPARATUS
- Publication number 20230357922
- Publication date Nov 9, 2023
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230077599
- Publication date Mar 16, 2023
- TOKYO ELECTRON LIMITED
- Yuji OTSUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20220411920
- Publication date Dec 29, 2022
- Tokyo Electron Limited
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE
- Publication number 20220403515
- Publication date Dec 22, 2022
- Tokyo Electron Limited
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20220333249
- Publication date Oct 20, 2022
- Tokyo Electron Limited
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD
- Publication number 20220165544
- Publication date May 26, 2022
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20220157616
- Publication date May 19, 2022
- TOKYO ELECTRON LIMITED
- Kae KUMAGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20210398863
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Yuji OTSUKI
- G01 - MEASURING TESTING
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210375589
- Publication date Dec 2, 2021
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210301402
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Yusuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OR APPARATUS FOR FORMING THIN FILM ON SUBSTRATE EMPLOYING AT...
- Publication number 20210217609
- Publication date Jul 15, 2021
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180166298
- Publication date Jun 14, 2018
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20180158671
- Publication date Jun 7, 2018
- Ayuta SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY AND EXHAUST STRUCTURE
- Publication number 20180155830
- Publication date Jun 7, 2018
- Ayuta SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING BASE FILM OF GRAPHENE, GRAPHENE FORMING METHOD,...
- Publication number 20170268103
- Publication date Sep 21, 2017
- Tokyo Electron Limited
- Daisuke NISHIDE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR PRODUCING CARBON NANOTUBES AND METHOD FOR FORMING WIRING
- Publication number 20160251757
- Publication date Sep 1, 2016
- TOKYO ELECTRON LIMITED
- Daisuke NISHIDE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Organic Semiconductor Film, Method for Manufacturing Same, and Tran...
- Publication number 20160118589
- Publication date Apr 28, 2016
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C07 - ORGANIC CHEMISTRY
Information Patent Application
METHOD FOR PRODUCING GRAPHENE
- Publication number 20160075560
- Publication date Mar 17, 2016
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING BASE FILM OF GRAPHENE, GRAPHENE FORMING METHOD,...
- Publication number 20160042958
- Publication date Feb 11, 2016
- TOKYO ELECTRON LIMITED
- Daisuke NISHIDE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Munehito KAGAYA

Person

Patents Grantslast 30 patents

Plasma processing device, and plasma processing method

Substrate processing method and substrate processing system

Film forming apparatus and film forming method

Film forming method and film forming apparatus

Film forming apparatus and film forming method

Process for producing carbon nanotubes and method for forming wiring

Substrate processing apparatus

Method for producing graphene

Graphene forming method

Patents Applicationslast 30 patents

METHOD OF MEASURING FILM THICKNESS, AND SUBSTRATE PROCESSING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD

METHOD OF FORMING SILICON NITRIDE FILM AND FILM FORMING APPARATUS

RECESS FILLING METHOD AND SUBSTRATE PROCESSING APPARATUS

SIN FILM EMBEDDING METHOD AND FILM FORMATION APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM FORMING APPARATUS AND FILM FORMING METHOD

FILM FORMING APPARATUS AND FILM FORMING METHOD

METHOD OR APPARATUS FOR FORMING THIN FILM ON SUBSTRATE EMPLOYING AT...

SUBSTRATE PROCESSING APPARATUS

FILM FORMING APPARATUS AND FILM FORMING METHOD

GAS SUPPLY AND EXHAUST STRUCTURE

METHOD FOR FORMING BASE FILM OF GRAPHENE, GRAPHENE FORMING METHOD,...

PROCESS FOR PRODUCING CARBON NANOTUBES AND METHOD FOR FORMING WIRING

Organic Semiconductor Film, Method for Manufacturing Same, and Tran...

METHOD FOR PRODUCING GRAPHENE

METHOD FOR FORMING BASE FILM OF GRAPHENE, GRAPHENE FORMING METHOD,...