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Munekazu KOYANAGI

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  • Tokyo, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Charged particle beam apparatus
    • Patent number 10,872,744
    • Issue date Dec 22, 2020
    • HITACHI HIGH-TECH CORPORATION
    • Munekazu Koyanagi
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    CHARGED PARTICLE BEAM DEVICE
    • Publication number 20200357601
    • Publication date Nov 12, 2020
    • Hirohisa ENOMOTO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Charged Particle Beam Apparatus
    • Publication number 20190148105
    • Publication date May 16, 2019
    • Hitachi High-Technologies Corporation
    • Munekazu KOYANAGI
    • H01 - BASIC ELECTRIC ELEMENTS