Munekazu Matsuo

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Microwave-excited plasma processing apparatus
- Patent number 7,392,760
- Issue date Jul 1, 2008
- ULVAC, Inc.
- Yoji Taguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Microwave-excited plasma processing apparatus
- Publication number 20050145178
- Publication date Jul 7, 2005
- Yoji Taguchi
- H01 - BASIC ELECTRIC ELEMENTS