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Munenori Fukunishi
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Yokohama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Observing method and its apparatus using electron microscope
Patent number
7,598,491
Issue date
Oct 6, 2009
Hitachi High-Technologies Corporation
Munenori Fukunishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope and a method for adjusting a focal poi...
Patent number
7,361,896
Issue date
Apr 22, 2008
Hitachi High-Technologies Corporation
Toshifumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for inspecting a specimen
Patent number
7,049,587
Issue date
May 23, 2006
Hitachi, Ltd.
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
Pattern inspection method and system therefor
Publication number
20070131877
Publication date
Jun 14, 2007
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Observing method and its apparatus using electron microscope
Publication number
20060289752
Publication date
Dec 28, 2006
Munenori Fukunishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for reviewing defects
Publication number
20060210144
Publication date
Sep 21, 2006
Kazuo Yamaguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Scanning electron microscope and a method for adjusting a focal poi...
Publication number
20050258366
Publication date
Nov 24, 2005
Toshifumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pattern inspection method and system therefor
Publication number
20030062487
Publication date
Apr 3, 2003
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Application
Apparatus for inspecting a specimen
Publication number
20030063792
Publication date
Apr 3, 2003
Takashi Hiroi
G01 - MEASURING TESTING