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Munenori Mashima
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Sanda, JP
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last 30 patents
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Patent Grant
Deposition-preventing part for physical vapor deposition apparatuses
Patent number
5,954,929
Issue date
Sep 21, 1999
Mitsubishi Materials Corporation
Naoki Uchiyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering target and method for manufacturing same
Patent number
5,435,965
Issue date
Jul 25, 1995
Mitsubishi Materials Corporation
Munenori Mashima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Target units
Patent number
5,338,425
Issue date
Aug 16, 1994
Mitsubishi Materials Corporation
Akifumi Mishima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...