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Muneyuki IMAI

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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing method
    • Patent number 10,923,358
    • Issue date Feb 16, 2021
    • Tokyo Electron Limited
    • Muneyuki Imai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing method
    • Patent number 10,256,107
    • Issue date Apr 9, 2019
    • Tokyo Electron Limited
    • Muneyuki Imai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing method
    • Patent number 10,141,195
    • Issue date Nov 27, 2018
    • Tokyo Electron Limited
    • Muneyuki Imai
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING METHOD
    • Publication number 20190109012
    • Publication date Apr 11, 2019
    • TOKYO ELECTRON LIMITED
    • Muneyuki IMAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate Processing Method
    • Publication number 20180061657
    • Publication date Mar 1, 2018
    • TOKYO ELECTRON LIMITED
    • Muneyuki IMAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD
    • Publication number 20170243753
    • Publication date Aug 24, 2017
    • Muneyuki IMAI
    • H01 - BASIC ELECTRIC ELEMENTS