Muneyuki Omi

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, substrate processing apparatus and cle...
- Patent number 11,631,590
- Issue date Apr 18, 2023
- Tokyo Electron Limited
- Muneyuki Omi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 10,867,777
- Issue date Dec 15, 2020
- Tokyo Electron Limited
- Wataru Takayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 10,784,088
- Issue date Sep 22, 2020
- Tokyo Electron Limited
- Dai Igarashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS, CONTROL METHOD, AND STORAGE MEDIUM
- Publication number 20230111278
- Publication date Apr 13, 2023
- TOKYO ELECTRON LIMITED
- Soya TODO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM
- Publication number 20230100292
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- KYURI MOTOKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND CLE...
- Publication number 20210035814
- Publication date Feb 4, 2021
- TOKYO ELECTRON LIMITED
- Muneyuki Omi
- B08 - CLEANING
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20190326103
- Publication date Oct 24, 2019
- TOKYO ELECTRON LIMITED
- Dai Igarashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20190279850
- Publication date Sep 12, 2019
- TOKYO ELECTRON LIMITED
- Wataru Takayama
- H01 - BASIC ELECTRIC ELEMENTS