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Muneyuki OTANI

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  • Oshu-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method of manufacturing semiconductor device and semiconductor device
    • Patent number 11,737,276
    • Issue date Aug 22, 2023
    • Tokyo Electron Limited
    • Sara Otsuki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Film forming method and film forming apparatus
    • Patent number 9,551,068
    • Issue date Jan 24, 2017
    • Tokyo Electron Limited
    • Takeshi Kumagai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of depositing a film
    • Patent number 9,441,291
    • Issue date Sep 13, 2016
    • Tokyo Electron Limited
    • Takeshi Kumagai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of depositing a film
    • Patent number 8,895,456
    • Issue date Nov 25, 2014
    • Tokyo Electron Limited
    • Mitsuhiro Tachibana
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE-PROCESSING APPARATUS AND FILM-FORMING METHOD
    • Publication number 20250003070
    • Publication date Jan 2, 2025
    • TOKYO ELECTRON LIMITED
    • Akira MATSUBARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION METHOD AND DEPOSITION APPARATUS
    • Publication number 20230407466
    • Publication date Dec 21, 2023
    • TOKYO ELECTRON LIMITED
    • Muneyuki OTANI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
    • Publication number 20220384473
    • Publication date Dec 1, 2022
    • TOKYO ELECTRON LIMITED
    • Sara OTSUKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20180245216
    • Publication date Aug 30, 2018
    • TOKYO ELECTRON LIMITED
    • Jun OGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20180237914
    • Publication date Aug 23, 2018
    • TOKYO ELECTRON LIMITED
    • Jun OGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF DEPOSITING A FILM
    • Publication number 20150322568
    • Publication date Nov 12, 2015
    • TOKYO ELECTRON LIMITED
    • Takeshi KUMAGAI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20150315705
    • Publication date Nov 5, 2015
    • TOKYO ELECTRON LIMITED
    • Takeshi KUMAGAI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...
    • Publication number 20150184294
    • Publication date Jul 2, 2015
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF DEPOSITING A FILM
    • Publication number 20140179122
    • Publication date Jun 26, 2014
    • TOKYO ELECTRON LIMITED
    • Mitsuhiro Tachibana
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...
    • Publication number 20110159188
    • Publication date Jun 30, 2011
    • TOKYO ELECTRON LIMITED
    • Hitoshi Kato
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...