Murali D. Rangachari

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for automating a microelectronic manufacturing...
- Patent number 6,810,294
- Issue date Oct 26, 2004
- Asyst Technologies, Inc.
- Murali D. Rangachari
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for automating a microelectric manufacturing p...
- Patent number 6,470,227
- Issue date Oct 22, 2002
- Murali D. Rangachari
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for automating a microelectronic manufacturing...
- Publication number 20030176940
- Publication date Sep 18, 2003
- Murali D. Rangachari
- G05 - CONTROLLING REGULATING