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Polishing slurry for cobalt-containing substrate
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Patent number 10,233,356
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Issue date Mar 19, 2019
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Rohm and Haas Electronic Materials CMP Holdings, Inc.
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Murali G. Theivanayagam
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Chemical mechanical polishing method for cobalt
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Patent number 10,170,335
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Issue date Jan 1, 2019
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Rohm and Haas Electronic Materials CMP Holdings, Inc.
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Murali G. Theivanayagam
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Method for polishing cobalt-containing substrate
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Patent number 10,077,382
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Issue date Sep 18, 2018
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Rohm and Haas Electronic Materials CMP Holdings, Inc.
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Hongyu Wang
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Lithium ion batteries
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Patent number 9,911,970
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Issue date Mar 6, 2018
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Dow Global Technologies LLC
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Murali G. Theivanayagam
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H01 - BASIC ELECTRIC ELEMENTS