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Murat BOZKURT
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Veldhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Methods and apparatus for monitoring a manufacturing process, inspe...
Patent number
11,698,346
Issue date
Jul 11, 2023
ASML Netherlands B.V.
Ioana Sorina Barbu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metrology method, patterning device, apparatus and computer program
Patent number
11,385,553
Issue date
Jul 12, 2022
ASML Netherlands B.V.
Zili Zhou
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for design of a metrology target
Patent number
11,003,099
Issue date
May 11, 2021
ASML Netherlands B.V.
Maurits Van Der Schaar
G01 - MEASURING TESTING
Information
Patent Grant
Metrology method, patterning device, apparatus and computer program
Patent number
10,996,570
Issue date
May 4, 2021
ASML Netherlands B.V.
Zili Zhou
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring a structure, inspection apparatus, lithographic...
Patent number
10,859,923
Issue date
Dec 8, 2020
ASML Netherlands B.V.
Gonzalo Roberto Sanguinetti
G01 - MEASURING TESTING
Information
Patent Grant
Metrology method, apparatus and computer program
Patent number
10,794,693
Issue date
Oct 6, 2020
ASML Netherlands B.V.
Farzad Farhadzadeh
G01 - MEASURING TESTING
Information
Patent Grant
Metrology method and apparatus, computer program and lithographic s...
Patent number
10,705,437
Issue date
Jul 7, 2020
ASML Netherlands B.V.
Narjes Javaheri
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring a structure, inspection apparatus, lithographic...
Patent number
10,564,552
Issue date
Feb 18, 2020
ASML Netherlands B.V.
Gonzalo Roberto Sanguinetti
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of measuring a structure, inspection apparatus, lithographic...
Patent number
10,481,506
Issue date
Nov 19, 2019
ASML Netherlands B.V.
Murat Bozkurt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for design of a metrology target
Patent number
10,437,163
Issue date
Oct 8, 2019
ASML Netherlands B.V.
Maurits Van Der Schaar
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring a property of a target structure, inspection ap...
Patent number
9,940,703
Issue date
Apr 10, 2018
ASML Netherlands B.V.
Murat Bozkurt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of measuring a property of a target structure, inspection ap...
Patent number
9,633,427
Issue date
Apr 25, 2017
ASML Netherlands B.V.
Murat Bozkurt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METROLOGY METHOD, PATTERNING DEVICE, APPARATUS AND COMPUTER PROGRAM
Publication number
20210255553
Publication date
Aug 19, 2021
ASML NETHERLANDS B.V.
Zili ZHOU
G01 - MEASURING TESTING
Information
Patent Application
Method of Measuring a Structure, Inspection Apparatus, Lithographic...
Publication number
20200183290
Publication date
Jun 11, 2020
ASML NETHERLANDS B.V.
Gonzalo Roberto SANGUINETTI
G01 - MEASURING TESTING
Information
Patent Application
Metrology Method, Patterning Device, Apparatus and Computer Program
Publication number
20200110342
Publication date
Apr 9, 2020
ASML NETHERLANDS B.V.
Zili ZHOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Measuring a Structure, Inspection Apparatus, Lithographic...
Publication number
20200050114
Publication date
Feb 13, 2020
ASML NETHERLANDS B.V.
Murat Bozkurt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and Apparatus for Design of a Metrology Target
Publication number
20200033741
Publication date
Jan 30, 2020
ASML NETHERLANDS B.V.
Maurits VAN DER SCHAAR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Method and Apparatus, Computer Program and Lithographic S...
Publication number
20190107785
Publication date
Apr 11, 2019
ASML NETHERLANDS B.V.
Narjes JAVAHERI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS AND APPARATUS FOR MONITORING A MANUFACTURING PROCESS, INSPE...
Publication number
20190072496
Publication date
Mar 7, 2019
ASML NETHERLANDS B.V.
Ioana Sorina Barbu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Method, Apparatus and Computer Program
Publication number
20190056220
Publication date
Feb 21, 2019
ASML NETHERLANDS B.V.
Farzad FARHADZADEH
G01 - MEASURING TESTING
Information
Patent Application
Method Of Measuring a Structure, Inspection Apparatus, Lithographic...
Publication number
20180373166
Publication date
Dec 27, 2018
ASML NETHERLANDS B.V.
Gonzalo Roberto SANGUINETTI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Measuring a Structure, Inspection Apparatus, Lithographic...
Publication number
20180321599
Publication date
Nov 8, 2018
ASML NETHERLANDS B.V.
Murat BOZKURT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and Apparatus for Design of a Metrology Target
Publication number
20180017881
Publication date
Jan 18, 2018
ASML NETHERLANDS B.V.
Maurits VAN DER SCHAAR
G01 - MEASURING TESTING
Information
Patent Application
Method of Measuring a Property of a Target Structure, Inspection Ap...
Publication number
20170206649
Publication date
Jul 20, 2017
ASML NETHERLANDS B.V.
Murat BOZKURT
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method of Measuring a Property of a Target Structure, Inspection Ap...
Publication number
20160086324
Publication date
Mar 24, 2016
ASML NETHERLANDS B.V.
Murat BOZKURT
G06 - COMPUTING CALCULATING COUNTING