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Power semiconductor device
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Patent number 10,559,659
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Issue date Feb 11, 2020
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Mitsubishi Electric Corporation
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Atsufumi Inoue
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H01 - BASIC ELECTRIC ELEMENTS
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Thin film forming apparatus using laser
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Patent number 6,110,291
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Issue date Aug 29, 2000
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Mitsubishi Denki Kabushiki Kaisha
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Kenyu Haruta
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma processor
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Patent number 5,146,138
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Issue date Sep 8, 1992
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Mitsubishi Denki Kabushiki Kaisha
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Hiroki Ootera
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processor
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Patent number 5,115,167
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Issue date May 19, 1992
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Mitsubishi Denki Kabushiki Kaisha
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Hiroki Ootera
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H01 - BASIC ELECTRIC ELEMENTS