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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer transport container interior atmosphere measurement device, w...
Patent number
11,135,623
Issue date
Oct 5, 2021
TDK Corporation
Mutsuo Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas purge unit, load port apparatus, and installation stand for pur...
Patent number
9,833,817
Issue date
Dec 5, 2017
TDK Corporation
Mutsuo Sasaki
B08 - CLEANING
Information
Patent Grant
Gas purge unit, load port apparatus, and installation stand for pur...
Patent number
9,786,531
Issue date
Oct 10, 2017
TDK Corporation
Mutsuo Sasaki
B08 - CLEANING
Information
Patent Grant
Load port apparatus and method of detecting object to be processed
Patent number
9,324,595
Issue date
Apr 26, 2016
TDK Corporation
Mutsuo Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Load port apparatus and dust exhaust method for load port apparatus
Patent number
8,485,771
Issue date
Jul 16, 2013
TDK Corporation
Mutsuo Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lid closing method for closed container and lid opening/closing sys...
Patent number
8,251,636
Issue date
Aug 28, 2012
TDK Corporation
Mutsuo Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer detecting device
Patent number
7,379,174
Issue date
May 27, 2008
TDK Corporation
Toshihiko Miyajima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Purging system and purging method for the interior of a portable ty...
Patent number
7,360,346
Issue date
Apr 22, 2008
TDK Corporation
Toshihiko Miyajima
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
WAFER TRANSPORT CONTAINER INTERIOR ATMOSPHERE MEASUREMENT DEVICE, W...
Publication number
20180161830
Publication date
Jun 14, 2018
TDK Corporation
Mutsuo SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS PURGE UNIT, LOAD PORT APPARATUS, AND INSTALLATION STAND FOR PUR...
Publication number
20170025299
Publication date
Jan 26, 2017
TDK Corporation
Mutsuo SASAKI
B08 - CLEANING
Information
Patent Application
GAS PURGE UNIT, LOAD PORT APPARATUS, AND INSTALLATION STAND FOR PUR...
Publication number
20160038982
Publication date
Feb 11, 2016
TDK Corporation
Mutsuo SASAKI
B08 - CLEANING
Information
Patent Application
LOAD PORT APPARATUS AND METHOD OF DETECTING OBJECT TO BE PROCESSED
Publication number
20130074615
Publication date
Mar 28, 2013
TDK Corporation
Mutsuo SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOAD PORT APPARATUS AND DUST EXHAUST METHOD FOR LOAD PORT APPARATUS
Publication number
20110070055
Publication date
Mar 24, 2011
TDK Corporation
Mutsuo SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LID CLOSING METHOD FOR CLOSED CONTAINER AND LID OPENING/CLOSING SYS...
Publication number
20100135755
Publication date
Jun 3, 2010
TDK Corporation
Mutsuo Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLOSED CONTAINER, LID OPENING AND CLOSING SYSTEM FOR CLOSED CONTAIN...
Publication number
20090245981
Publication date
Oct 1, 2009
TDK Corporation
Toshihiko Miyajima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer detecting device
Publication number
20060087661
Publication date
Apr 27, 2006
TDK Corporation
Toshihiko Miyajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Purging system and purging method for the interior of a portable ty...
Publication number
20050069420
Publication date
Mar 31, 2005
TDK Corporation
Toshihiko Miyajima
H01 - BASIC ELECTRIC ELEMENTS